Abstract
The stick–slip driving is widely used in the field of nanotechnology because of its high resolution and theoretically unlimited displacement. However, it suffers from such problems as low velocity and one-step displacement instability. In this paper, a method to improve the performance of inertial stick–slip movement from the perspective of overturning moment is proposed. Firstly, modeling and mechanical analysis of the inertial stick–slip platform structure. Then analyzing the influence of overturning moment through the conservation of energy and getting calculation results. Finally, building an experimental system for verification and finding that the height of the inertial force dropped by 5 mm, and the prototype single step displacement increased by 26%. Through theoretical calculation and experiment, the influence of overturning moment on inertial stick–slip motion is verified, which provides further guidance for inertial stick–slip motion platform design.
| Original language | English |
|---|---|
| Pages (from-to) | 3673-3681 |
| Number of pages | 9 |
| Journal | Microsystem Technologies |
| Volume | 25 |
| Issue number | 10 |
| DOIs | |
| State | Published - 1 Oct 2019 |
| Externally published | Yes |
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