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Analysis of inertial stick–slip motion error based on overturning moment

  • Bowen Zhong
  • , Bin Liu*
  • , Ziqi Jin
  • , Haidong He
  • , Zhenhua Wang
  • , Lining Sun
  • *Corresponding author for this work
  • Soochow University

Research output: Contribution to journalArticlepeer-review

Abstract

The stick–slip driving is widely used in the field of nanotechnology because of its high resolution and theoretically unlimited displacement. However, it suffers from such problems as low velocity and one-step displacement instability. In this paper, a method to improve the performance of inertial stick–slip movement from the perspective of overturning moment is proposed. Firstly, modeling and mechanical analysis of the inertial stick–slip platform structure. Then analyzing the influence of overturning moment through the conservation of energy and getting calculation results. Finally, building an experimental system for verification and finding that the height of the inertial force dropped by 5 mm, and the prototype single step displacement increased by 26%. Through theoretical calculation and experiment, the influence of overturning moment on inertial stick–slip motion is verified, which provides further guidance for inertial stick–slip motion platform design.

Original languageEnglish
Pages (from-to)3673-3681
Number of pages9
JournalMicrosystem Technologies
Volume25
Issue number10
DOIs
StatePublished - 1 Oct 2019
Externally publishedYes

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