TY - GEN
T1 - Analysis of broken wires during gold wire bonding process
AU - Pan, Mingqiang
AU - Chen, Tao
AU - Chen, Liguo
AU - Sun, Lining
PY - 2012
Y1 - 2012
N2 - Wire bonding is one of the critical technologies of devices production, assembly and packaging in the microelectronic and MEMS field. During bonding process, the gold wires break easily, because the wires are repeatedly operated with high-speed. Therefore, the experiments were performed to analyze bonding process and the reason causing wire break. The results show that it is critical to prevent the broken wire to control the pressure wire pressure, the speed and angle of the pulling wire structure, the clamp gap, the capillary tip gap, and discharging energy in bonding process. the broken wire doesn't occurs when the pressure wire pressure, the speed of the pulling wire structure, the angle of the pulling wire structure, the clamp gap, the capillary tip gap, the time and the current are 3-5g, 5rad/s and 10rad, 0.1-0.3mm, 1mm, 35ms and 10mA, respectively.
AB - Wire bonding is one of the critical technologies of devices production, assembly and packaging in the microelectronic and MEMS field. During bonding process, the gold wires break easily, because the wires are repeatedly operated with high-speed. Therefore, the experiments were performed to analyze bonding process and the reason causing wire break. The results show that it is critical to prevent the broken wire to control the pressure wire pressure, the speed and angle of the pulling wire structure, the clamp gap, the capillary tip gap, and discharging energy in bonding process. the broken wire doesn't occurs when the pressure wire pressure, the speed of the pulling wire structure, the angle of the pulling wire structure, the clamp gap, the capillary tip gap, the time and the current are 3-5g, 5rad/s and 10rad, 0.1-0.3mm, 1mm, 35ms and 10mA, respectively.
KW - Broken wire
KW - Gold wires
KW - Wire bonding
UR - https://www.scopus.com/pages/publications/84863152216
U2 - 10.4028/www.scientific.net/KEM.503.298
DO - 10.4028/www.scientific.net/KEM.503.298
M3 - 会议稿件
AN - SCOPUS:84863152216
SN - 9783037853641
T3 - Key Engineering Materials
SP - 298
EP - 302
BT - Micro-Nano Technology XIII
PB - Trans Tech Publications Ltd
T2 - 13th Annual Conference of Chinese Society of Micro-Nano Technology, CSMNT 2011
Y2 - 28 September 2011 through 30 September 2011
ER -