Analysis and optimization of microchannel array precision grinding processes with micro-structured micro-grinding tool

Micro-grinding has been widely used in aerospace and other industry. However, the small diameter of the micro-grinding tool has limited its machining performance and efficiency. In order to solve the above problems, micro-structure has been applied on the micro-grinding tool. A morphology modeling has been established in this study to characterize the surface of micro-structured micro-grinding tool, and the grinding performance of micro-structured micro-grinding tool has been analyzed through undeformed chip thickness, abrasive edge width, and effective distance between abrasives. Then deviation analysis, path optimization and parameter optimization of microchannel array precision grinding have been finished to improve processing quality and efficiency, and the deflection angle has the most obvious effects on the rectangular slot depth, micro-structured micro-grinding tool could reduce 10% surface roughness and 20% grinding force compared to original micro-grinding tool. Finally, the microchannel array has been machined with a size deviation of 2 μm and surface roughness of 0.2 μm.