TY - GEN
T1 - Analysis and design of a low stiffness flat type vertical-gap passive maglev vibration isolation unit
AU - Zhou, Y.
AU - Kou, B.
AU - Yang, X.
AU - Zhang, H.
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/7/14
Y1 - 2015/7/14
N2 - Improving accuracy is one of the most important research topics in many advanced industrial applications, such as microscopy, biomedical science and semiconductor lithography. On the one hand, to improve the accuracy requires improvement on the system precision, on the other hand, it requires improvement on the system vibration isolation capability. At present, active vibration isolation system composed of actuators and springs are widely used in precision manufacturing system and precision measurement system, and can effectively isolate the vibration to ensure the accuracy of the system.
AB - Improving accuracy is one of the most important research topics in many advanced industrial applications, such as microscopy, biomedical science and semiconductor lithography. On the one hand, to improve the accuracy requires improvement on the system precision, on the other hand, it requires improvement on the system vibration isolation capability. At present, active vibration isolation system composed of actuators and springs are widely used in precision manufacturing system and precision measurement system, and can effectively isolate the vibration to ensure the accuracy of the system.
UR - https://www.scopus.com/pages/publications/84942474819
U2 - 10.1109/INTMAG.2015.7157220
DO - 10.1109/INTMAG.2015.7157220
M3 - 会议稿件
AN - SCOPUS:84942474819
T3 - 2015 IEEE International Magnetics Conference, INTERMAG 2015
BT - 2015 IEEE International Magnetics Conference, INTERMAG 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2015 IEEE International Magnetics Conference, INTERMAG 2015
Y2 - 11 May 2015 through 15 May 2015
ER -