An Investigation on the 3D Micromachining Techniques based on a SPM

Y. D. Yan; T. Sun; S. Dong; Y. C. Liang; K. Cheng

An Investigation on the 3D Micromachining Techniques based on a SPM

Y. D. Yan^*
, T. Sun
, S. Dong
, Y. C. Liang
, K. Cheng

^*Corresponding author for this work

School of Mechatronics Engineering

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Traditional micromachining methods are very difficult to achieve three-dimensional machining of microstructures. To solve this problem, a 3D machining method based on a SPM and a precision stage is proposed, in which the diamond tip of the SPM is used to scratch the sample surface. Based on the two-dimensional machining technique, the 3D machining technique was studied. The machining mechanism and machining properties of the microstructures were investigated. Different SPM working modes were also studied. The method provides a new way for manufacturing the 3D microstructures such as the moulds of micro sensors and micro parts.

Original language	English
Pages (from-to)	465-470
Number of pages	6
Journal	Key Engineering Materials
Volume	257-258
State	Published - 2004

Keywords

3-D Micro Machining
Precision 3D Stages
SPM
Scanning Probe Microscope

Cite this

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title = "An Investigation on the 3D Micromachining Techniques based on a SPM",

abstract = "Traditional micromachining methods are very difficult to achieve three-dimensional machining of microstructures. To solve this problem, a 3D machining method based on a SPM and a precision stage is proposed, in which the diamond tip of the SPM is used to scratch the sample surface. Based on the two-dimensional machining technique, the 3D machining technique was studied. The machining mechanism and machining properties of the microstructures were investigated. Different SPM working modes were also studied. The method provides a new way for manufacturing the 3D microstructures such as the moulds of micro sensors and micro parts.",

keywords = "3-D Micro Machining, Precision 3D Stages, SPM, Scanning Probe Microscope",

author = "Yan, \{Y. D.\} and T. Sun and S. Dong and Liang, \{Y. C.\} and K. Cheng",

year = "2004",

language = "英语",

volume = "257-258",

pages = "465--470",

journal = "Key Engineering Materials",

issn = "1013-9826",

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T1 - An Investigation on the 3D Micromachining Techniques based on a SPM

AU - Yan, Y. D.

AU - Sun, T.

AU - Dong, S.

AU - Liang, Y. C.

AU - Cheng, K.

PY - 2004

Y1 - 2004

N2 - Traditional micromachining methods are very difficult to achieve three-dimensional machining of microstructures. To solve this problem, a 3D machining method based on a SPM and a precision stage is proposed, in which the diamond tip of the SPM is used to scratch the sample surface. Based on the two-dimensional machining technique, the 3D machining technique was studied. The machining mechanism and machining properties of the microstructures were investigated. Different SPM working modes were also studied. The method provides a new way for manufacturing the 3D microstructures such as the moulds of micro sensors and micro parts.

AB - Traditional micromachining methods are very difficult to achieve three-dimensional machining of microstructures. To solve this problem, a 3D machining method based on a SPM and a precision stage is proposed, in which the diamond tip of the SPM is used to scratch the sample surface. Based on the two-dimensional machining technique, the 3D machining technique was studied. The machining mechanism and machining properties of the microstructures were investigated. Different SPM working modes were also studied. The method provides a new way for manufacturing the 3D microstructures such as the moulds of micro sensors and micro parts.

KW - 3-D Micro Machining

KW - Precision 3D Stages

KW - SPM

KW - Scanning Probe Microscope

UR - https://www.scopus.com/pages/publications/17644446214

M3 - 文章

AN - SCOPUS:17644446214

SN - 1013-9826

VL - 257-258

SP - 465

EP - 470

JO - Key Engineering Materials

JF - Key Engineering Materials

ER -

An Investigation on the 3D Micromachining Techniques based on a SPM

Abstract

Keywords

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