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An investigation of the cutting strategy for the machining of polar microstructures used in ultra-precision machining optical precision measurement

  • Chen Yang Zhao
  • , Chi Fai Cheung*
  • , Wen Peng Fu
  • *Corresponding author for this work
  • Harbin Institute of Technology Shenzhen
  • Hong Kong Polytechnic University

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, an investigation of cutting strategy is presented for the optimization of machining parameters in the ultra-precision machining of polar microstructures, which are used for optical precision measurement. The critical machining parameters affecting the surface generation and surface quality in the machining of polar microstructures are studied. Hence, the critical ranges of machining parameters have been determined through a series of cutting simulations, as well as cutting experiments. First of all, the influence of field of view (FOV) is investigated. After that, theoretical modeling of polar microstructures is built to generate the simulated surface topography of polar microstructures. A feature point detection algorithm is built for image processing of polar microstructures. Hence, an experimental investigation of the influence of cutting tool geometry, depth of cut, and groove spacing of polar microstructures was conducted. There are transition points from which the patterns of surface generation of polar microstructures vary with the machining parameters. The optimization of machining parameters and determination of the optimized cutting strategy are undertaken in the ultra-precision machining of polar microstructures.

Original languageEnglish
Article number755
JournalMicromachines
Volume12
Issue number7
DOIs
StatePublished - Jul 2021
Externally publishedYes

Keywords

  • Cutting strategy
  • Machining parameters
  • Optimization
  • Polar microstructures
  • Ultra-precision machining

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