@inproceedings{cb7e585fcccb4063a923aac82784affc,
title = "An improved PSO algorithm and its application on model identification of coarse-stage in lithography machine",
abstract = "Lithography machine is a high-precision manufacturing equipment of electromechanical integration , involving precision machinery, precision control and measure , precision measurement and other subjects. PSO Algorithm is easy to fall into local optimum,which has simple concepts and fast convergence. This paper proposes an improved PSO algorithm with adaptive parameters and boundary constraint, in ensuring accuracy of the algorithm optimization and fast convergence. Simulation results show that the methods have good applicability and stability for coarse-stage in lithpgraphy machine.",
keywords = "Lithography machine, Model identification, PSO algorithm",
author = "Liu Yang and Liu Fazhi and Wei Kai and Fu Zhenxian",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 ; Conference date: 08-08-2014 Through 10-08-2014",
year = "2015",
doi = "10.1117/12.2182382",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xianfang Wen and Jiubin Tan",
booktitle = "Ninth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "美国",
}