An Electromagnetic Microvalve for Pneumatic Control of Microfluidic Systems

An electromagnetic microvalve for pneumatic control of microfluidic devices has been designed, fabricated, and tested. The microvalve is composed of two parts: a miniature electromagnetic actuator and a valve body. The electromagnetic actuator consists mainly of a thin polydimethylsiloxane (PDMS)–based elastomer, which acts as the valve diaphragm. The diaphragm, used as a solid hydraulic medium, converts the large contact area of a valve core into a small contact area of valve head while maintaining a large stroking force. This microvalve remains closed because of a compressed mechanical spring force generated by the actuator. On the other hand, when a voltage is applied, the valve core moves up, relaxing the thin PDMS membrane, opening the microvalve. The fast open response (~17 ms) of the valve was achieved with a leak rate as low as 0.026 sccm at 200 KPa (N2) pressure. We tested the pertinent dynamic parameters such as flow rate in on/off mode, flow rate of duty cycles, and actuated frequencies in pulse width modulation (PWM) mode. Our method provides a simple, cheap, and small microvalve that avoids the bulky and expensive external pressure control solenoid manifold. This allows it to be easily integrated into portable and disposable devices.