@inproceedings{38ddb9dd43724a22b599de042208a9c5,
title = "An analysis and performance assessment of double EWMA control systems",
abstract = "Run-to-run (RtR) control technology has received tremendous interest in semiconductor manufacturing industry. Exponentially weighted moving average (EWMA), double EWMA controllers are recognized most popular control schemes for RtR control. In this paper, stability analysis of double EWMA control system is examined in control theory. The novelty of this work is that an iterative method is developed to obtain the best achievable performance of the double EWMA control system. The performance of double EWMA control system is evaluated and the discount factors are retuned. Simulation example is given to show the effectiveness of the proposed method.",
keywords = "Run-to-run control, best achievable performance (BAP), double exponentially weighted moving average (EWMA), performance assessment",
author = "Mingda Ma and Feng Tan and Kai Zhang and Guangren Duan",
note = "Publisher Copyright: {\textcopyright} 2014 TCCT, CAA.; Proceedings of the 33rd Chinese Control Conference, CCC 2014 ; Conference date: 28-07-2014 Through 30-07-2014",
year = "2014",
month = sep,
day = "11",
doi = "10.1109/ChiCC.2014.6897116",
language = "英语",
series = "Proceedings of the 33rd Chinese Control Conference, CCC 2014",
publisher = "IEEE Computer Society",
pages = "2985--2989",
editor = "Shengyuan Xu and Qianchuan Zhao",
booktitle = "Proceedings of the 33rd Chinese Control Conference, CCC 2014",
address = "美国",
}