An alternative micro-area X-ray diffraction method for residual stress measurement of Pb(Zr,Ti)O3 film

F. Yang; W. D. Fei; Z. M. Gao; J. Q. Jiang

doi:10.1016/j.surfcoat.2007.04.125

An alternative micro-area X-ray diffraction method for residual stress measurement of Pb(Zr,Ti)O₃ film

F. Yang^*
, W. D. Fei
, Z. M. Gao
, J. Q. Jiang

^*Corresponding author for this work

Southeast University, Nanjing
Harbin Institute of Technology
College of Chemistry

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

An alternative X-ray diffraction method for micro-area residual stress measurement was proposed by means of the analysis of a single diffraction ring, which was performed on a laboratory X-ray microdiffraction system equipped with a 2D planar detector. The microdiffraction experiments were employed to evaluate the residual stress in sol-gel-derived Pb(Zr,Ti)O₃ film before and after Ag electrode deposition. The tensile stresses of about 2.3 GPa and 1.2 GPa were calculated in the micro-area of film without and with electrode, which was related to a top electrode stress relaxation effect.

Original language	English
Pages (from-to)	121-125
Number of pages	5
Journal	Surface and Coatings Technology
Volume	202
Issue number	1
DOIs	https://doi.org/10.1016/j.surfcoat.2007.04.125
State	Published - 15 Nov 2007
Externally published	Yes

Keywords

Ag electrode
Residual stress
Sol-gel
XRD

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10.1016/j.surfcoat.2007.04.125

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title = "An alternative micro-area X-ray diffraction method for residual stress measurement of Pb(Zr,Ti)O3 film",

abstract = "An alternative X-ray diffraction method for micro-area residual stress measurement was proposed by means of the analysis of a single diffraction ring, which was performed on a laboratory X-ray microdiffraction system equipped with a 2D planar detector. The microdiffraction experiments were employed to evaluate the residual stress in sol-gel-derived Pb(Zr,Ti)O3 film before and after Ag electrode deposition. The tensile stresses of about 2.3 GPa and 1.2 GPa were calculated in the micro-area of film without and with electrode, which was related to a top electrode stress relaxation effect.",

keywords = "Ag electrode, Residual stress, Sol-gel, XRD",

author = "F. Yang and Fei, \{W. D.\} and Gao, \{Z. M.\} and Jiang, \{J. Q.\}",

year = "2007",

month = nov,

day = "15",

doi = "10.1016/j.surfcoat.2007.04.125",

language = "英语",

volume = "202",

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T1 - An alternative micro-area X-ray diffraction method for residual stress measurement of Pb(Zr,Ti)O3 film

AU - Yang, F.

AU - Fei, W. D.

AU - Gao, Z. M.

AU - Jiang, J. Q.

PY - 2007/11/15

Y1 - 2007/11/15

N2 - An alternative X-ray diffraction method for micro-area residual stress measurement was proposed by means of the analysis of a single diffraction ring, which was performed on a laboratory X-ray microdiffraction system equipped with a 2D planar detector. The microdiffraction experiments were employed to evaluate the residual stress in sol-gel-derived Pb(Zr,Ti)O3 film before and after Ag electrode deposition. The tensile stresses of about 2.3 GPa and 1.2 GPa were calculated in the micro-area of film without and with electrode, which was related to a top electrode stress relaxation effect.

AB - An alternative X-ray diffraction method for micro-area residual stress measurement was proposed by means of the analysis of a single diffraction ring, which was performed on a laboratory X-ray microdiffraction system equipped with a 2D planar detector. The microdiffraction experiments were employed to evaluate the residual stress in sol-gel-derived Pb(Zr,Ti)O3 film before and after Ag electrode deposition. The tensile stresses of about 2.3 GPa and 1.2 GPa were calculated in the micro-area of film without and with electrode, which was related to a top electrode stress relaxation effect.

KW - Ag electrode

KW - Residual stress

KW - Sol-gel

KW - XRD

UR - https://www.scopus.com/pages/publications/34948842906

U2 - 10.1016/j.surfcoat.2007.04.125

DO - 10.1016/j.surfcoat.2007.04.125

M3 - 文章

AN - SCOPUS:34948842906

SN - 0257-8972

VL - 202

SP - 121

EP - 125

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1

ER -

An alternative micro-area X-ray diffraction method for residual stress measurement of Pb(Zr,Ti)O₃ film

Abstract

Keywords

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