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All-Polymer Soft-X-Ray-Charged Piezoelectret for Push-Button Energy Harvester

  • The University of Tokyo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 J electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 × higher than conventional MEMS-based piezoelectrets.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages920-923
Number of pages4
ISBN (Electronic)9781665412674
DOIs
StatePublished - 20 Jun 2021
Externally publishedYes
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 20 Jun 202125 Jun 2021

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period20/06/2125/06/21

Keywords

  • All-polymer piezoelectret
  • d33
  • push-button kinetic energy harvesting
  • soft X-ray charging

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