TY - GEN
T1 - All-Polymer Soft-X-Ray-Charged Piezoelectret for Push-Button Energy Harvester
AU - Lu, Jia
AU - Suzuki, Yuji
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/6/20
Y1 - 2021/6/20
N2 - Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 J electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 × higher than conventional MEMS-based piezoelectrets.
AB - Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 J electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 × higher than conventional MEMS-based piezoelectrets.
KW - All-polymer piezoelectret
KW - d33
KW - push-button kinetic energy harvesting
KW - soft X-ray charging
UR - https://www.scopus.com/pages/publications/85114960535
U2 - 10.1109/Transducers50396.2021.9495733
DO - 10.1109/Transducers50396.2021.9495733
M3 - 会议稿件
AN - SCOPUS:85114960535
T3 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
SP - 920
EP - 923
BT - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Y2 - 20 June 2021 through 25 June 2021
ER -