Adhesion improvement of cubic boron nitride films by in situ annealing

J. Yu; S. H. Song; L. Q. Weng

doi:10.1016/j.surfcoat.2005.04.008

Adhesion improvement of cubic boron nitride films by in situ annealing

J. Yu^*
, S. H. Song
, L. Q. Weng

^*Corresponding author for this work

Harbin Institute of Technology (Shenzhen)

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Effects of in situ annealing on adhesion and structure of thick and highly crystallized cubic boron nitride films deposited by bias assisted dc jet plasma chemical vapor deposition were investigated. Improvement of adhesion by in situ annealing was observed. The full width at half maximum of Raman and X-ray diffraction peaks decreased after in situ annealing. The calculated crystal size increases from 18.4 to 27.2 nm after in situ annealing at 1060-1100 °C. Thick and highly crystallized cubic boron nitride films were obtained by combining our growth process and the in situ annealing.

Original language	English
Pages (from-to)	4737-4740
Number of pages	4
Journal	Surface and Coatings Technology
Volume	200
Issue number	16-17
DOIs	https://doi.org/10.1016/j.surfcoat.2005.04.008
State	Published - 27 Apr 2006
Externally published	Yes

Keywords

Adhesion
Annealing
Chemical vapor deposition
Cubic boron nitride
Raman

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10.1016/j.surfcoat.2005.04.008

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title = "Adhesion improvement of cubic boron nitride films by in situ annealing",

abstract = "Effects of in situ annealing on adhesion and structure of thick and highly crystallized cubic boron nitride films deposited by bias assisted dc jet plasma chemical vapor deposition were investigated. Improvement of adhesion by in situ annealing was observed. The full width at half maximum of Raman and X-ray diffraction peaks decreased after in situ annealing. The calculated crystal size increases from 18.4 to 27.2 nm after in situ annealing at 1060-1100 °C. Thick and highly crystallized cubic boron nitride films were obtained by combining our growth process and the in situ annealing.",

keywords = "Adhesion, Annealing, Chemical vapor deposition, Cubic boron nitride, Raman",

author = "J. Yu and Song, \{S. H.\} and Weng, \{L. Q.\}",

year = "2006",

month = apr,

day = "27",

doi = "10.1016/j.surfcoat.2005.04.008",

language = "英语",

volume = "200",

pages = "4737--4740",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "16-17",

}

TY - JOUR

T1 - Adhesion improvement of cubic boron nitride films by in situ annealing

AU - Yu, J.

AU - Song, S. H.

AU - Weng, L. Q.

PY - 2006/4/27

Y1 - 2006/4/27

N2 - Effects of in situ annealing on adhesion and structure of thick and highly crystallized cubic boron nitride films deposited by bias assisted dc jet plasma chemical vapor deposition were investigated. Improvement of adhesion by in situ annealing was observed. The full width at half maximum of Raman and X-ray diffraction peaks decreased after in situ annealing. The calculated crystal size increases from 18.4 to 27.2 nm after in situ annealing at 1060-1100 °C. Thick and highly crystallized cubic boron nitride films were obtained by combining our growth process and the in situ annealing.

AB - Effects of in situ annealing on adhesion and structure of thick and highly crystallized cubic boron nitride films deposited by bias assisted dc jet plasma chemical vapor deposition were investigated. Improvement of adhesion by in situ annealing was observed. The full width at half maximum of Raman and X-ray diffraction peaks decreased after in situ annealing. The calculated crystal size increases from 18.4 to 27.2 nm after in situ annealing at 1060-1100 °C. Thick and highly crystallized cubic boron nitride films were obtained by combining our growth process and the in situ annealing.

KW - Adhesion

KW - Annealing

KW - Chemical vapor deposition

KW - Cubic boron nitride

KW - Raman

UR - https://www.scopus.com/pages/publications/33645010452

U2 - 10.1016/j.surfcoat.2005.04.008

DO - 10.1016/j.surfcoat.2005.04.008

M3 - 文章

AN - SCOPUS:33645010452

SN - 0257-8972

VL - 200

SP - 4737

EP - 4740

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 16-17

ER -

Adhesion improvement of cubic boron nitride films by in situ annealing

Abstract

Keywords

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