Skip to main navigation Skip to search Skip to main content

Adding high time resolution to charge-state-specific ion energy measurements for pulsed copper vacuum arc plasmas

  • Koichi Tanaka
  • , Liang Han
  • , Xue Zhou
  • , André Anders
  • Mitsubishi Materials Corporation
  • Lawrence Berkeley National Laboratory
  • Xidian University
  • School of Electrical Engineering and Automation, Harbin Institute of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

Charge-state-resolved ion energy-time distributions of pulsed Cu arc plasma were obtained by using direct (time-dependent) acquisition of the ion detection signal from a commercial ion mass-per-charge and energy-per-charge analyzer. We find a shift of energies of Cu2+, Cu3+ and Cu4+ ions to lower values during the first few hundred microseconds after arc ignition, which is evidence for particle collisions in the plasma. The generation of Cu+ ions in the later part of the pulse, measured by the increase of Cu+ signal intensity and an associated slight reduction of the mean charge state, points to charge exchange reactions between ions and neutrals. At the very beginning of the pulse, when the plasma expands into vacuum and the plasma potential strongly fluctuates, ions with much higher energy (over 200 eV) are observed. Early in the pulse, the ion energies observed are approximately proportional to the ion charge state, and we conclude that the acceleration mechanism is primarily based on acceleration in an electric field. This field is directed away from the cathode, indicative of a potential hump. Measurements by a floating probe suggest that potential structures travel, and ions moving in the traveling field can gain high energies up to a few hundred electron-volts. Later in the pulse, the approximate proportionality is lost, which is related to increased smearing out of different energies due to collisions with neutrals, and/or to a change of the acceleration character from electrostatic to 'gas-dynamic', i.e. dominated by pressure gradient.

Original languageEnglish
Article number045010
JournalPlasma Sources Science and Technology
Volume24
Issue number4
DOIs
StatePublished - 1 Aug 2015
Externally publishedYes

Keywords

  • arc discharges
  • ion energy distributions
  • plasma diagnostics
  • time-resolved measurements

Fingerprint

Dive into the research topics of 'Adding high time resolution to charge-state-specific ion energy measurements for pulsed copper vacuum arc plasmas'. Together they form a unique fingerprint.

Cite this