Adaptive output feedback control for piezoactuator-driven stage

The accuracy and dynamic characteristics of piezoactuator-driven stage mainly depend on whether the controller can effectively compensate the inherent hysteresis of piezoactuator. For this problem, a neural network (NN) based adaptive output feedback control scheme is proposed. In order to avoid the impact of the velocity measurement noise of the piezoactuator, a high-gain observer is used to estimate unmeasured velocity of the system, and a neural network dynamic compensation strategy is proposed. A robust controller is used to compensate the neural network approximation error and the observer estimation error. Finally, the stability analysis is given by Lyapunov stability theory. Simulation results show the effectiveness of the proposed method.