Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter

Jia Hui Fu; Guo Hui Yang; Xun Jun He; Kai Tang; Qun Wu

doi:10.1109/INDIN.2008.4618058

Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter

Jia Hui Fu^*
, Guo Hui Yang
, Xun Jun He
, Kai Tang
, Qun Wu

^*Corresponding author for this work

School of Electronics and Information Engineering, Harbin Institute of Technology
Harbin University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Abstract-The reliability of MEMS switches is closely linked to their operational and environmental conditions. This paper reports on the investigation of the actuated voltage shift mechanism in MEMS capacitive switch for millimeter-wave phase shifter design. Considering the dielectric charging and polarization effects on capacitive MEMS switch with silicon nitride as dielectric layer, an accurate model of dielectric charging and voltage shift caused by charge injection under applied voltage and signal is presented, and the influences of applied voltage, applied signal and temperature on the actuated voltage shift are performed. The result shows the proposed model provides valuable insight into the factor impacting the reliability of devices.

Original language	English
Title of host publication	Proceedings - IEEE INDIN 2008
Subtitle of host publication	6th IEEE International Conference on Industrial Informatics
Pages	20-24
Number of pages	5
DOIs	https://doi.org/10.1109/INDIN.2008.4618058
State	Published - 2008
Externally published	Yes
Event	IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics - Daejeon, Korea, Republic of Duration: 13 Jul 2008 → 16 Jul 2008

Publication series

Name	IEEE International Conference on Industrial Informatics (INDIN)
ISSN (Print)	1935-4576

Conference

Conference	IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics
Country/Territory	Korea, Republic of
City	Daejeon
Period	13/07/08 → 16/07/08

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10.1109/INDIN.2008.4618058

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Fu, J. H., Yang, G. H., He, X. J., Tang, K., & Wu, Q. (2008). Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter. In Proceedings - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics (pp. 20-24). Article 4618058 (IEEE International Conference on Industrial Informatics (INDIN)). https://doi.org/10.1109/INDIN.2008.4618058

@inproceedings{1241b84a3d25460db3cf81cdc82328a1,

title = "Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter",

abstract = "Abstract-The reliability of MEMS switches is closely linked to their operational and environmental conditions. This paper reports on the investigation of the actuated voltage shift mechanism in MEMS capacitive switch for millimeter-wave phase shifter design. Considering the dielectric charging and polarization effects on capacitive MEMS switch with silicon nitride as dielectric layer, an accurate model of dielectric charging and voltage shift caused by charge injection under applied voltage and signal is presented, and the influences of applied voltage, applied signal and temperature on the actuated voltage shift are performed. The result shows the proposed model provides valuable insight into the factor impacting the reliability of devices.",

author = "Fu, \{Jia Hui\} and Yang, \{Guo Hui\} and He, \{Xun Jun\} and Kai Tang and Qun Wu",

year = "2008",

doi = "10.1109/INDIN.2008.4618058",

language = "英语",

isbn = "9781424421718",

series = "IEEE International Conference on Industrial Informatics (INDIN)",

pages = "20--24",

booktitle = "Proceedings - IEEE INDIN 2008",

note = "IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics ; Conference date: 13-07-2008 Through 16-07-2008",

}

Fu, JH , Yang, GH, He, XJ, Tang, K & Wu, Q 2008, Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter. in Proceedings - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics., 4618058, IEEE International Conference on Industrial Informatics (INDIN), pp. 20-24, IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics, Daejeon, Korea, Republic of, 13/07/08. https://doi.org/10.1109/INDIN.2008.4618058

Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter. / Fu, Jia Hui ; Yang, Guo Hui; He, Xun Jun et al.
Proceedings - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics. 2008. p. 20-24 4618058 (IEEE International Conference on Industrial Informatics (INDIN)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter

AU - Fu, Jia Hui

AU - Yang, Guo Hui

AU - He, Xun Jun

AU - Tang, Kai

AU - Wu, Qun

PY - 2008

Y1 - 2008

N2 - Abstract-The reliability of MEMS switches is closely linked to their operational and environmental conditions. This paper reports on the investigation of the actuated voltage shift mechanism in MEMS capacitive switch for millimeter-wave phase shifter design. Considering the dielectric charging and polarization effects on capacitive MEMS switch with silicon nitride as dielectric layer, an accurate model of dielectric charging and voltage shift caused by charge injection under applied voltage and signal is presented, and the influences of applied voltage, applied signal and temperature on the actuated voltage shift are performed. The result shows the proposed model provides valuable insight into the factor impacting the reliability of devices.

AB - Abstract-The reliability of MEMS switches is closely linked to their operational and environmental conditions. This paper reports on the investigation of the actuated voltage shift mechanism in MEMS capacitive switch for millimeter-wave phase shifter design. Considering the dielectric charging and polarization effects on capacitive MEMS switch with silicon nitride as dielectric layer, an accurate model of dielectric charging and voltage shift caused by charge injection under applied voltage and signal is presented, and the influences of applied voltage, applied signal and temperature on the actuated voltage shift are performed. The result shows the proposed model provides valuable insight into the factor impacting the reliability of devices.

UR - https://www.scopus.com/pages/publications/54849405342

U2 - 10.1109/INDIN.2008.4618058

DO - 10.1109/INDIN.2008.4618058

M3 - 会议稿件

AN - SCOPUS:54849405342

SN - 9781424421718

T3 - IEEE International Conference on Industrial Informatics (INDIN)

SP - 20

EP - 24

BT - Proceedings - IEEE INDIN 2008

T2 - IEEE INDIN 2008: 6th IEEE International Conference on Industrial Informatics

Y2 - 13 July 2008 through 16 July 2008

ER -

Actuated voltage shift mechanisms of MEMS capacitive switch based on distributed phase shifter

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