Achieving tip-based down-milling forming of nanograting structures with variable heights through precise control of nano revolving trajectories

Bo Xue; Huilin Yan; Zhengchang Liu; Yongda Yan; Yanquan Geng

doi:10.1088/2631-7990/add2e0

Achieving tip-based down-milling forming of nanograting structures with variable heights through precise control of nano revolving trajectories

Bo Xue^*
, Huilin Yan
, Zhengchang Liu
, Yongda Yan^*
, Yanquan Geng^*

^*Corresponding author for this work

School of Mechatronics Engineering

College of Mechanical and Electrical Engineering, Northeast Forestry University

Research output: Contribution to journal › Article › peer-review

29 Scopus citations

Abstract

Highlights: A novel machining method for nanograting structures with variable heights based on tip-based down-milling forming is proposed. The undeformed grating area which determines geometric formation of the grating is regulated by the revolving trajectory. FE analysis is implemented to explain the plastic deformation mechanisms of the material under different trajectories. The desired trajectories are filtered out by a comprehensive comparison of machining performance. Nanograting structures with continuous height variations of up to 220 nm in a spacing of 400 nm are fabricated with good geometric consistency.

Original language	English
Article number	055101
Journal	International Journal of Extreme Manufacturing
Volume	7
Issue number	5
DOIs	https://doi.org/10.1088/2631-7990/add2e0
State	Published - 1 Oct 2025

Keywords

down-milling trajectory
grating height
nanograting structures
tip-based nanomachining
undeformed grating area

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10.1088/2631-7990/add2e0

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title = "Achieving tip-based down-milling forming of nanograting structures with variable heights through precise control of nano revolving trajectories",

abstract = "Highlights: A novel machining method for nanograting structures with variable heights based on tip-based down-milling forming is proposed. The undeformed grating area which determines geometric formation of the grating is regulated by the revolving trajectory. FE analysis is implemented to explain the plastic deformation mechanisms of the material under different trajectories. The desired trajectories are filtered out by a comprehensive comparison of machining performance. Nanograting structures with continuous height variations of up to 220 nm in a spacing of 400 nm are fabricated with good geometric consistency.",

keywords = "down-milling trajectory, grating height, nanograting structures, tip-based nanomachining, undeformed grating area",

author = "Bo Xue and Huilin Yan and Zhengchang Liu and Yongda Yan and Yanquan Geng",

note = "Publisher Copyright: {\textcopyright} 2025 The Author(s). Published by IOP Publishing Ltd on behalf of the Institute of Machinery Manufacturing Technology.",

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T1 - Achieving tip-based down-milling forming of nanograting structures with variable heights through precise control of nano revolving trajectories

AU - Xue, Bo

AU - Yan, Huilin

AU - Liu, Zhengchang

AU - Yan, Yongda

AU - Geng, Yanquan

PY - 2025/10/1

Y1 - 2025/10/1

N2 - Highlights: A novel machining method for nanograting structures with variable heights based on tip-based down-milling forming is proposed. The undeformed grating area which determines geometric formation of the grating is regulated by the revolving trajectory. FE analysis is implemented to explain the plastic deformation mechanisms of the material under different trajectories. The desired trajectories are filtered out by a comprehensive comparison of machining performance. Nanograting structures with continuous height variations of up to 220 nm in a spacing of 400 nm are fabricated with good geometric consistency.

AB - Highlights: A novel machining method for nanograting structures with variable heights based on tip-based down-milling forming is proposed. The undeformed grating area which determines geometric formation of the grating is regulated by the revolving trajectory. FE analysis is implemented to explain the plastic deformation mechanisms of the material under different trajectories. The desired trajectories are filtered out by a comprehensive comparison of machining performance. Nanograting structures with continuous height variations of up to 220 nm in a spacing of 400 nm are fabricated with good geometric consistency.

KW - down-milling trajectory

KW - grating height

KW - nanograting structures

KW - tip-based nanomachining

KW - undeformed grating area

UR - https://www.scopus.com/pages/publications/105005346728

U2 - 10.1088/2631-7990/add2e0

DO - 10.1088/2631-7990/add2e0

M3 - 文章

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SN - 2631-8644

VL - 7

JO - International Journal of Extreme Manufacturing

JF - International Journal of Extreme Manufacturing

IS - 5

M1 - 055101

ER -

Achieving tip-based down-milling forming of nanograting structures with variable heights through precise control of nano revolving trajectories

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Keywords

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