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Achieving Robust Single-Event Irradiation Tolerance in 6-inch E-mode GaN-on-Sapphire HEMTs With a Thin AlN Buffer

  • Can Zou
  • , Yan Ma
  • , Yiteng Yu
  • , Zhengxiang Tang
  • , Tianqi Wang
  • , Jianli Liu
  • , Zhengliang Zhang
  • , Zheng Zhang
  • , Liuxing Dai
  • , Yuanyang Xia
  • , Leke Wu
  • , Yiheng Li
  • , Tinggang Zhu
  • , Weizong Xu
  • , Dunjun Chen
  • , Rong Zhang
  • , Feng Zhou*
  • , Hai Lu*
  • *Corresponding author for this work
  • Nanjing University
  • Harbin Institute of Technology
  • China National Nuclear Corporation
  • Ltd.
  • CorEnergy Semiconductor Company Ltd.

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Power electronic devices exposed to the space environment face severe threats from high-energy space heavy-ion irradiation. This work demonstrates that p-GaN HEMTs fabricated on low-cost 6-inch sapphire substrates exhibit robust single-event irradiation hardness under 1.3 GeV heavy ion bombardment. The enhanced hardness is primarily attributed to the drastically reduced ion deposition energy in the thin AlN buffer coupled with the insulating properties of the sapphire substrate. Resultantly, the irradiation-hardened HEMTs achieve a remarkable single-event burnout voltage exceeding 700V, substantially surpassing that of the conventional GaN-on-Si HEMTs. Furthermore, the irradiated devices maintain fast switching performance, with turn-ON and turn-OFF times in the nanosecond range. These superior irradiation performances, achieved by simple, cost-effective GaN-on-sapphire technology, offer a promising pathway toward high-voltage, irradiation-hardened power devices for aerospace applications.

Original languageEnglish
Title of host publication2026 IEEE 38th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2026
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages545-548
Number of pages4
ISBN (Electronic)9798331577834
DOIs
StatePublished - 2026
Event38th IEEE International Symposium on Power Semiconductor Devices and ICs, ISPSD 2026 - Las Vegas, United States
Duration: 24 May 202628 May 2026

Publication series

NameProceedings of the International Symposium on Power Semiconductor Devices and ICs
ISSN (Print)1063-6854

Conference

Conference38th IEEE International Symposium on Power Semiconductor Devices and ICs, ISPSD 2026
Country/TerritoryUnited States
CityLas Vegas
Period24/05/2628/05/26

Keywords

  • GaN HEMT
  • GaN-on-sapphire
  • ion deposition energy
  • ion energy
  • single event burnout
  • thin epitaxy

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