TY - GEN
T1 - A Wearable Piezoelectro-Triboelectric Microsensor Using Novel Electrodes Based on MEMS Technology
AU - Zhou, Nannan
AU - Ao, Hongrui
N1 - Publisher Copyright:
© 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
PY - 2022
Y1 - 2022
N2 - The development of the microsensors provides the possibility of solving problems such as clinical treatment, environmental monitoring, and disease prevention. In this paper, MEMS technology is used to dope nanoparticles in the preparation of organic film electrodes which can be combined with a metal electrode to form a novel electrode. This is also an important step in the sensor preparation process. The output performance and wearability of the sensor are measured. The experimental results show that the wearable sensor designed in this paper has excellent output performance and sensing characteristics. This indicates that the novel electrode not only improves the performance of the microsensors, but also expands the application range of the wearable sensors. This study provides a valuable reference for the design of the wearable sensors.
AB - The development of the microsensors provides the possibility of solving problems such as clinical treatment, environmental monitoring, and disease prevention. In this paper, MEMS technology is used to dope nanoparticles in the preparation of organic film electrodes which can be combined with a metal electrode to form a novel electrode. This is also an important step in the sensor preparation process. The output performance and wearability of the sensor are measured. The experimental results show that the wearable sensor designed in this paper has excellent output performance and sensing characteristics. This indicates that the novel electrode not only improves the performance of the microsensors, but also expands the application range of the wearable sensors. This study provides a valuable reference for the design of the wearable sensors.
KW - Novel electrode
KW - Piezoelectric effect
KW - Triboelectric effect
KW - Wearable sensor
UR - https://www.scopus.com/pages/publications/85127856937
U2 - 10.1007/978-981-16-7381-8_64
DO - 10.1007/978-981-16-7381-8_64
M3 - 会议稿件
AN - SCOPUS:85127856937
SN - 9789811673801
T3 - Mechanisms and Machine Science
SP - 1017
EP - 1025
BT - Advances in Mechanical Design - Proceedings of the 2021 International Conference on Mechanical Design, ICMD 2021
A2 - Tan, Jianrong
PB - Springer Science and Business Media B.V.
T2 - International Conference on Mechanical Design, ICMD 2021
Y2 - 11 August 2021 through 13 August 2021
ER -