A three-dimensional piezoelectric nanopositioner using a sandwich transducer

This work presents a three-dimensional piezoelectric nanopositioner based on a sandwich transducer is fabricated and tested. The proposed piezoelectric positioner mainly consists of five parts: driving tip, horn, sheet copper, PZT plates and end cap, and the size of the positioner is 60 mm × 60 mm × 90 mm. The positioner utilizes the operating principle of composite mode to accomplish different driving purposes. The operating principle of the piezoelectric positioner is discussed detailly and simulated by the finite element method. The working ranges of the proposed positioner in X, Y, Z direction are tested as 9.18 µm, 9.06 µm and 1.55 µm, respectively. Meanwhile, the positioner shows the characters of the resolution of 13 nm, working frequency up to 800 Hz and small location error (less than 1%).