A study of relationship between laser intensity and scanning frequency in MEMS scanning system

Chunhui Wang; Yang Qu; Yajun Pang; Xiaoyao Ren

doi:10.1016/j.infrared.2015.01.025

A study of relationship between laser intensity and scanning frequency in MEMS scanning system

Chunhui Wang
, Yang Qu^*
, Yajun Pang
, Xiaoyao Ren

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The periodic variation of laser intensity in MEMS scanning interferometer system is one of the most important factors which influence the interferometer performance. In this paper, we analyzed the relationship between MEMS scanning device scanning frequency and the received laser intensity, by simulation and experiment, get the conclusion of that: in MEMS scanning interferometer system, the slow axis vibration frequency of MEMS scanning device determines the received laser intensity.

Original language	English
Pages (from-to)	179-183
Number of pages	5
Journal	Infrared Physics and Technology
Volume	69
DOIs	https://doi.org/10.1016/j.infrared.2015.01.025
State	Published - Jun 2015

Keywords

Frequency
Intensity
Interference
MEMS

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10.1016/j.infrared.2015.01.025

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title = "A study of relationship between laser intensity and scanning frequency in MEMS scanning system",

abstract = "The periodic variation of laser intensity in MEMS scanning interferometer system is one of the most important factors which influence the interferometer performance. In this paper, we analyzed the relationship between MEMS scanning device scanning frequency and the received laser intensity, by simulation and experiment, get the conclusion of that: in MEMS scanning interferometer system, the slow axis vibration frequency of MEMS scanning device determines the received laser intensity.",

keywords = "Frequency, Intensity, Interference, MEMS",

author = "Chunhui Wang and Yang Qu and Yajun Pang and Xiaoyao Ren",

year = "2015",

month = jun,

doi = "10.1016/j.infrared.2015.01.025",

language = "英语",

volume = "69",

pages = "179--183",

journal = "Infrared Physics and Technology",

issn = "1350-4495",

publisher = "Elsevier B.V.",

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T1 - A study of relationship between laser intensity and scanning frequency in MEMS scanning system

AU - Wang, Chunhui

AU - Qu, Yang

AU - Pang, Yajun

AU - Ren, Xiaoyao

PY - 2015/6

Y1 - 2015/6

N2 - The periodic variation of laser intensity in MEMS scanning interferometer system is one of the most important factors which influence the interferometer performance. In this paper, we analyzed the relationship between MEMS scanning device scanning frequency and the received laser intensity, by simulation and experiment, get the conclusion of that: in MEMS scanning interferometer system, the slow axis vibration frequency of MEMS scanning device determines the received laser intensity.

AB - The periodic variation of laser intensity in MEMS scanning interferometer system is one of the most important factors which influence the interferometer performance. In this paper, we analyzed the relationship between MEMS scanning device scanning frequency and the received laser intensity, by simulation and experiment, get the conclusion of that: in MEMS scanning interferometer system, the slow axis vibration frequency of MEMS scanning device determines the received laser intensity.

KW - Frequency

KW - Intensity

KW - Interference

KW - MEMS

UR - https://www.scopus.com/pages/publications/84923349647

U2 - 10.1016/j.infrared.2015.01.025

DO - 10.1016/j.infrared.2015.01.025

M3 - 文章

AN - SCOPUS:84923349647

SN - 1350-4495

VL - 69

SP - 179

EP - 183

JO - Infrared Physics and Technology

JF - Infrared Physics and Technology

ER -

A study of relationship between laser intensity and scanning frequency in MEMS scanning system

Abstract

Keywords

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