Abstract
A six-axis heterodyne interferometer system has been designed for the joule balance to measure the relative displacement between the suspended coil and the exciting coil. The essential optical components in this system are three dual-axis heterodyne interferometers. Each interferometer can simultaneously measure the displacements of one retroreflector (RR) on the suspended coil and one RR on the exciting coil. Because of the common path structure, this interferometer is susceptible to periodic nonlinearity caused by double-frequency mixing. However, a method can be used to eliminate the periodic errors. The measured displacements can be strictly locked to integral multiples of half the wavelength. This method was theoretically analyzed and finally verified by the experiment.
| Original language | English |
|---|---|
| Article number | 7801852 |
| Pages (from-to) | 1579-1585 |
| Number of pages | 7 |
| Journal | IEEE Transactions on Instrumentation and Measurement |
| Volume | 66 |
| Issue number | 6 |
| DOIs | |
| State | Published - Jun 2017 |
Keywords
- Feedback control
- Joule balance
- Laser interferometer
- Measurement uncertainty
- Periodic nonlinearity
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