TY - GEN
T1 - A Separated Wheatstone Bridge Sensor with a High Sensitivity of Torsion Angle Applied for MEMS Mirrors
AU - Shi, Penghong
AU - Xue, Gaopeng
AU - Yan, Changzhao
AU - Yuan, Zirui
AU - Luo, Yangyu
AU - Yang, Zhenjun
AU - Li, Bing
N1 - Publisher Copyright:
© 2026 IEEE.
PY - 2026
Y1 - 2026
N2 - This research proposes a separated Wheatstone-bridge piezoresistive angular sensing architecture for high-precision closed-loop angular feedback in MEMS mirrors. The proposed design overcomes the limited differential efficiency and routing constraints encountered in conventional integrated bridge layouts under stress-gradient conditions of torsion-bars. Instead of placing all four piezoresistors on a single torsion-bar, the two resistor pairs are spatially separated and symmetrically located at the root regions of two torsion-bars. This configuration effectively enhances the sensitivity. Fabricated on a 4-inch SOI wafer, the device demonstrates a normalized angular sensitivity of 5.72 mV/°/V, representing an improvement of approximately 5.3× over the conventional design. These results verify the effectiveness of the proposed configuration for high-sensitivity angular feedback in MEMS mirrors, offering a practical and layout-compatible sensing solution for high-bandwidth closed-loop control systems.
AB - This research proposes a separated Wheatstone-bridge piezoresistive angular sensing architecture for high-precision closed-loop angular feedback in MEMS mirrors. The proposed design overcomes the limited differential efficiency and routing constraints encountered in conventional integrated bridge layouts under stress-gradient conditions of torsion-bars. Instead of placing all four piezoresistors on a single torsion-bar, the two resistor pairs are spatially separated and symmetrically located at the root regions of two torsion-bars. This configuration effectively enhances the sensitivity. Fabricated on a 4-inch SOI wafer, the device demonstrates a normalized angular sensitivity of 5.72 mV/°/V, representing an improvement of approximately 5.3× over the conventional design. These results verify the effectiveness of the proposed configuration for high-sensitivity angular feedback in MEMS mirrors, offering a practical and layout-compatible sensing solution for high-bandwidth closed-loop control systems.
KW - MEMS mirror
KW - Wheatstone bridge sensor
KW - angular sensor
KW - sensitivity enhancement
UR - https://www.scopus.com/pages/publications/105047783802
U2 - 10.1109/NEMS69704.2026.11633557
DO - 10.1109/NEMS69704.2026.11633557
M3 - 会议稿件
AN - SCOPUS:105047783802
T3 - 2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026
SP - 39
EP - 42
BT - 2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026
Y2 - 17 April 2026 through 21 April 2026
ER -