@inproceedings{d5970fc184fe49f39582c76aea2fc658,
title = "A room-temperature bonding of glass nanofluidic chips utilizing a surface activation with a fluorine-containing plasma treatment",
abstract = "We developed a strong bonding of glass nanofluidic chips at room temperature (RT) in ambient air, overcoming the strict requirements for glass fusion bonding conventionally performed at extremely high temperature (∼1,000 °C) in vacuum.",
keywords = "Bonding, Glass, Nanofluidic, Plasma, Room-temperature",
author = "Yan Xu and Chenxi Wang and Kihoon Jang and Lixiao Li and Nobuhiro Matsumoto and Yiyang Dong and Kazuma Mawatari and Tadatomo Suga and Takehiko Kitamori",
year = "2012",
language = "英语",
isbn = "9780979806452",
series = "Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012",
publisher = "Chemical and Biological Microsystems Society",
pages = "1225--1227",
booktitle = "Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012",
note = "16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012 ; Conference date: 28-10-2012 Through 01-11-2012",
}