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A post-bond TSVs test solution for leakage fault

  • School of Electronics and Information Engineering, Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

During the 3-D ICs manufacturing process, TSVs are susceptible to undergo different faults. Among these faults, the leakage fault is one of the most common cases. In this paper, a new test structure based on the improved ring oscillator circuit is proposed to detect the TSV leakage fault. An accurate TSV leakage fault model extracted from three-dimensional full-wave simulation is adopted in the test structure. HSPICE Monte Carlo simulation shows that the proposed test structure can detect the weak leakage faults with no less than 0.2025um2 pin-hole area, which is a larger coverage compared with the traditional test structure.

Original languageEnglish
Title of host publicationProceedings - 2019 IEEE International Test Conference in Asia, ITC-Asia 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages127-132
Number of pages6
ISBN (Electronic)9781728147185
DOIs
StatePublished - Sep 2019
Externally publishedYes
Event3rd IEEE International Test Conference in Asia, ITC-Asia 2019 - Tokyo, Japan
Duration: 3 Sep 20195 Sep 2019

Publication series

NameProceedings - 2019 IEEE International Test Conference in Asia, ITC-Asia 2019

Conference

Conference3rd IEEE International Test Conference in Asia, ITC-Asia 2019
Country/TerritoryJapan
CityTokyo
Period3/09/195/09/19

Keywords

  • 3-D ICs
  • Leakage fault
  • Ring oscillator
  • TSV test

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