A phenomenological approach for the Id/Ig ratio and sp3 fraction of magnetron sputtered a-C films

S. Zhang; X. T. Zeng; H. Xie; P. Hing

doi:10.1016/S0257-8972(99)00523-X

A phenomenological approach for the I_d/I_g ratio and sp³ fraction of magnetron sputtered a-C films

S. Zhang^*
, X. T. Zeng
, H. Xie
, P. Hing

^*Corresponding author for this work

Agency for Science, Technology and Research, Singapore
Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

212 Scopus citations

Abstract

Amorphous carbon coatings (a-C and a-C:H) less than 100nm thick were deposited on KBr, and silicon wafer substrates via magnetron sputtering of a graphite target in argon, argon/hydrogen and argon/nitrogen atmospheres. Electron energy loss spectroscopy (EELS) analysis was used to quantify the sp²/sp³ bonding in the films. Free-standing films of amorphous carbon were produced by sputtering onto compressed KBr pellets and then floating off in distilled water for EELS study. Raman spectroscopy was used to measure the peak intensity ratio of the D-band to that of the G-band (I_d/I_g). This showed that the sp³ fraction is inversely proportional to the band ratio I_d/I_g. At the same time, the G-band peak position P_g decreases while the sp³ fraction increases.

Original language	English
Pages (from-to)	256-260
Number of pages	5
Journal	Surface and Coatings Technology
Volume	123
Issue number	2-3
DOIs	https://doi.org/10.1016/S0257-8972(99)00523-X
State	Published - 24 Jan 2000
Externally published	Yes

Keywords

A-C
Diamond-like carbon
Electron energy loss spectroscopy
Raman shift
Sp bonding

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10.1016/S0257-8972(99)00523-X

Cite this

@article{ce4edcb22adf4a6fb3d454eafc333d16,

title = "A phenomenological approach for the Id/Ig ratio and sp3 fraction of magnetron sputtered a-C films",

abstract = "Amorphous carbon coatings (a-C and a-C:H) less than 100nm thick were deposited on KBr, and silicon wafer substrates via magnetron sputtering of a graphite target in argon, argon/hydrogen and argon/nitrogen atmospheres. Electron energy loss spectroscopy (EELS) analysis was used to quantify the sp2/sp3 bonding in the films. Free-standing films of amorphous carbon were produced by sputtering onto compressed KBr pellets and then floating off in distilled water for EELS study. Raman spectroscopy was used to measure the peak intensity ratio of the D-band to that of the G-band (Id/Ig). This showed that the sp3 fraction is inversely proportional to the band ratio Id/Ig. At the same time, the G-band peak position Pg decreases while the sp3 fraction increases.",

keywords = "A-C, Diamond-like carbon, Electron energy loss spectroscopy, Raman shift, Sp bonding",

author = "S. Zhang and Zeng, \{X. T.\} and H. Xie and P. Hing",

year = "2000",

month = jan,

day = "24",

doi = "10.1016/S0257-8972(99)00523-X",

language = "英语",

volume = "123",

pages = "256--260",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

number = "2-3",

}

TY - JOUR

T1 - A phenomenological approach for the Id/Ig ratio and sp3 fraction of magnetron sputtered a-C films

AU - Zhang, S.

AU - Zeng, X. T.

AU - Xie, H.

AU - Hing, P.

PY - 2000/1/24

Y1 - 2000/1/24

N2 - Amorphous carbon coatings (a-C and a-C:H) less than 100nm thick were deposited on KBr, and silicon wafer substrates via magnetron sputtering of a graphite target in argon, argon/hydrogen and argon/nitrogen atmospheres. Electron energy loss spectroscopy (EELS) analysis was used to quantify the sp2/sp3 bonding in the films. Free-standing films of amorphous carbon were produced by sputtering onto compressed KBr pellets and then floating off in distilled water for EELS study. Raman spectroscopy was used to measure the peak intensity ratio of the D-band to that of the G-band (Id/Ig). This showed that the sp3 fraction is inversely proportional to the band ratio Id/Ig. At the same time, the G-band peak position Pg decreases while the sp3 fraction increases.

AB - Amorphous carbon coatings (a-C and a-C:H) less than 100nm thick were deposited on KBr, and silicon wafer substrates via magnetron sputtering of a graphite target in argon, argon/hydrogen and argon/nitrogen atmospheres. Electron energy loss spectroscopy (EELS) analysis was used to quantify the sp2/sp3 bonding in the films. Free-standing films of amorphous carbon were produced by sputtering onto compressed KBr pellets and then floating off in distilled water for EELS study. Raman spectroscopy was used to measure the peak intensity ratio of the D-band to that of the G-band (Id/Ig). This showed that the sp3 fraction is inversely proportional to the band ratio Id/Ig. At the same time, the G-band peak position Pg decreases while the sp3 fraction increases.

KW - A-C

KW - Diamond-like carbon

KW - Electron energy loss spectroscopy

KW - Raman shift

KW - Sp bonding

UR - https://www.scopus.com/pages/publications/0033882949

U2 - 10.1016/S0257-8972(99)00523-X

DO - 10.1016/S0257-8972(99)00523-X

M3 - 文章

AN - SCOPUS:0033882949

SN - 0257-8972

VL - 123

SP - 256

EP - 260

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 2-3

ER -

A phenomenological approach for the I_d/I_g ratio and sp³ fraction of magnetron sputtered a-C films

Abstract

Keywords

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