A novel piezoelectric-based active-passive vibration isolator for low-frequency vibration system and experimental analysis of vibration isolation performance

Low-frequency vibration is the core problem that hinders high-precision equipment's positioning accuracy and control accuracy. This paper presents an active-passive integrated vibration isolator based on piezoelectric ceramics to solve the vibration problem. An active-passive vibration isolator with a piezoelectric actuator in the active part and a damping buffer in the passive part is designed, and its dynamic simplified model is established. The feedforward and feedback control system is established, the active controller is designed, and the vibration isolation performance of the active-passive vibration isolator is high. And it can effectively achieve vibration isolation from 5 Hz to 500 Hz, verified by experiment and the worst vibration isolation effect can still achieve 30% attenuation of the excitation amplitude. This kind of active-passive vibration isolator improves the passive vibration isolation low-frequency vibration isolation effect, dramatically reduces the resonance peak of the system, and broadens the frequency band. It can be extensively applied to low-frequency vibration systems, such as aerospace and high-precision equipment.