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A novel miniaturized EDM mechanism based on linear stepping ultrasonic motor

  • Y. J. Tang*
  • , F. Q. Hu
  • , Z. L. Wang
  • , W. S. Zhao
  • *Corresponding author for this work
  • Harbin Institute of Technology

Research output: Contribution to journalConference articlepeer-review

Abstract

In order to machine inclined micro-holes and operate in narrow space, a novel miniaturized EDM (Electro Discharge Machining) mechanism has been developed. Because of its merit of compact size (70×40×50mm), the mechanism can be fixed on robot. The prototype of miniaturized EDM system consists of electrode direct drive unit, EDM electrical parameters and servo controller, ultrasonic EDM generator, manual robot, in addition to miniaturized EDM mechanism. Differential Reciprocating Driving Method (DRDM) is presented, and the coaxial forced vibration of electrode can be achieved. Coaxial vibration is applied to promote the evacuation of debris, and it helps to achieve stable and efficient machining. The optimal design of ultrasonic motor has been implemented using Finite Element Method (FEM), and the reasonable structure has been achieved. Feeding resolution of electrode can reach 40nm in differential reciprocating style. The holes with figures of Φ85μm circle, Φ90μm inclined circle. Y and inclined Y have been machined.

Original languageEnglish
Article number604006
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6040
DOIs
StatePublished - 2005
EventICMIT 2005: Mechatronics, MEMS and Smart Materials - Changchun, China
Duration: 20 Sep 200523 Sep 2005

Keywords

  • Differential reciprocating
  • Direct drive
  • Miniaturized EDM
  • Ultrasonic motor (USM)

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