A non-contact picking device based on the coupling action of ultrasonic levitation and vacuum adsorption

Many precision components, such as silicon wafers, optical lenses, etc., require high surface quality for their working performance. In the process of picking up and transferring components and materials, the surface of the components is easily damaged by physical contact. The high requirements of modern precision instruments and equipment on the surface accuracy of components highlight the limitations of traditional contact picking and transfer methods. Based on the nearfield levitation technology and the principle of vacuum adsorption, a new type of non-contact pick-up and transfer device is proposed in this paper. It can be used as an end effector of robotic arm for the pick-up and transport of disc-shaped precision components. The device realizes non-contact operation of disc objects with the action of the grasping suction force provided by the negative static pressure and the levitation repulsion force generated by the ultrasonic field. Based on theoretical and simulation methods, the structure of the non-contact grabbing and transporting device is designed, and the working process of the levitation grabbing of the device is analyzed in this paper. A non-contact grasping operation experiment testing device is built, and the grasping experiments to disk-shaped objects are carried out. Experimental result demonstrates that the proposed device can realize the non-contact effectively and be reliable picking of disc-shaped objects.