@inproceedings{b5baf9d7e7de482cbffc34b29fdd2605,
title = "A new method of estimating null time in ellipsometry",
abstract = "A new method which can estimate the null time in the ellipsometry is developed in order to measure precisely the thickness and refractive index of thin film. Ten images are taken consecutively at the null time during the measurement, and ten sets of (Pi, Ai) value for the images are obtained. The gray scale matrices of different images are analyzed and transformed, then the real values of the (Pi, Ai) for the sample are determined. Distribution of the thickness and the refractive index of the sample are presented. The measurement accuracy for thickness and refractive index are 1nm and 0.01, respectively.",
keywords = "Ellipsometry, Grayscale measurement, Monolayer film, Null method",
author = "Long Gao and Chunhui Wang and Yanchao Li and Haifang Cong and Yang Qu",
year = "2010",
doi = "10.1109/CISP.2010.5647838",
language = "英语",
isbn = "9781424465149",
series = "Proceedings - 2010 3rd International Congress on Image and Signal Processing, CISP 2010",
pages = "2461--2464",
booktitle = "Proceedings - 2010 3rd International Congress on Image and Signal Processing, CISP 2010",
note = "2010 3rd International Congress on Image and Signal Processing, CISP 2010 ; Conference date: 16-10-2010 Through 18-10-2010",
}