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A new fiber optic sensor for inner surface roughness measurement

  • Xiaomei Xu*
  • , Shoubin Liu
  • , Hong Hu
  • *Corresponding author for this work
  • Harbin Institute of Technology Shenzhen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In order to measure inner surface roughness of small holes nondestructively, a new fiber optic sensor is researched and developed. Firstly, a new model for surface roughness measurement is proposed, which is based on intensity-modulated fiber optic sensors and scattering modeling of rough surfaces. Secondly, a fiber optical measurement system is designed and set up. Under the help of new techniques, the fiber optic sensor can be miniaturized. Furthermore, the use of micro prism makes the light turn 90 degree, so the inner side surface roughness of small holes can be measured. Thirdly, the fiber optic sensor is gauged by standard surface roughness specimens, and a series of measurement experiments have been done. The measurement results are compared with those obtained by TR220 Surface Roughness Instrument and Form Talysurf Laser 635, and validity of the developed fiber optic sensor is verified. Finally, precision and influence factors of the fiber optic sensor are analyzed.

Original languageEnglish
Title of host publication2009 International Conference on Optical Instruments and Technology - Advanced Sensor Technologies and Applications
DOIs
StatePublished - 2009
Externally publishedYes
Event2009 International Conference on Optical Instruments and Technology, OIT'09 - Shanghai, China
Duration: 19 Oct 200921 Oct 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7508
ISSN (Print)0277-786X

Conference

Conference2009 International Conference on Optical Instruments and Technology, OIT'09
Country/TerritoryChina
CityShanghai
Period19/10/0921/10/09

Keywords

  • Fiber optic sensor
  • Inner surface roughness
  • Intensity modulation
  • Nondestructive measurement

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