@inproceedings{c7e1a2596d614af5a6aafd93b67396b1,
title = "A microplatform for measurement of cell mechanical properties",
abstract = "a novel microplatform has been fabricated on SOI wafers for applying uniaxial strain to a single cell while simultaneously measuring its force response. This microplatform includes two chevron thermal actuators able to bring cells 14 um stretching displacement and an easy-fabricating piezoresistivelateral force sensor with a sensitivity of 56.166 (V/V)/N, which makes it an effective tool for analyzing the mechanics of a single cell. This lateral force sensor has a low requirement for the lithography alignment and its piezoresistors are formed by one-step surface ion implantation. A front-side releasing method is applied to suspend this microplatform. This method helps us avoid from the friction problems and low yield rates that common appeared in the traditional method. Our design provides a good reference for devising lateral force sensors and suspending complex microstructures.",
keywords = "Cell mechanics, Lateral force sensor, Piezoresistive, Single cell, Thermal actuator, Uniaxial stretch",
author = "Hao Tang and Zheyao Wang and Shouhong Jin and Qiong Wu",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 13th IEEE SENSORS Conference, SENSORS 2014 ; Conference date: 02-11-2014 Through 05-11-2014",
year = "2014",
month = dec,
day = "12",
doi = "10.1109/ICSENS.2014.6985329",
language = "英语",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "December",
pages = "1619--1622",
editor = "Arregui, \{Francisco J.\}",
booktitle = "IEEE SENSORS 2014, Proceedings",
address = "美国",
edition = "December",
}