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A method of second harmonic measuring glass thickness with ultra-precision based on multi-beam laser heterodyne

  • Chun Hui Wang*
  • , Yan Chao Li
  • , Long Gao
  • , Ya Jun Pang
  • *Corresponding author for this work
  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper puts forwards a novel method of second harmonic of multi-beam laser heterodyne measurement for the thickness of the glass, which is based on the combination of Doppler effect and heterodyne technology, loaded the information of the thickness to the frequency difference of the multi-beam laser heterodyne signal by frequency modulation of the oscillating mirror, which is in the light path. Heterodyne signal frequency can be obtained by fast Fourier transform, and can obtain values of the thickness accurately after the multi-beam laser heterodyne signal demodulation. This method is used for simulate values of different thickness of the glass through numerical simulation of MATLAB and the obtained result shows that maximal relative error is less than 0.02%.

Original languageEnglish
Title of host publication2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011
Pages236-239
Number of pages4
DOIs
StatePublished - 2011
Event2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011 - Harbin, China
Duration: 12 Oct 201116 Oct 2011

Publication series

Name2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011

Conference

Conference2011 Academic International Symposium on Optoelectronics and Microelectronics Technology, AISOMT 2011
Country/TerritoryChina
CityHarbin
Period12/10/1116/10/11

Keywords

  • Fourier analysis
  • Heterodyne
  • Nondestructive testing

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