TY - GEN
T1 - A MEMS Skewed Oscillating Mirror with Built-In Piezoresistive Sensor for Photoacoustic Gas Detection
AU - Liu, Yun
AU - Shi, Penghong
AU - Chen, Yufan
AU - Lu, Yuqin
AU - Zhu, Minjie
AU - Li, Bing
AU - Xue, Gaopeng
N1 - Publisher Copyright:
© 2026 IEEE.
PY - 2026
Y1 - 2026
N2 - This study reports a MEMS skewed oscillating mirror with built-in piezoresistive angle sensor for photoacoustic spectroscopy gas detection. The MEMS mirror with asymmetric configuration is more conducive to generating a torsional motion when excited by acoustic wave. The torsional angle, i.e., the resonant amplitude, can be linearly detected by a built-in piezo-resistive Wheatstone bridge angle sensor. To enhance the photoacoustic signal, the resonant frequency of the MEMS mirror (designed: 5702 Hz; fabricated: 5222 Hz) matches with that of the photoacoustic chamber (designed: 5249 Hz) as much as possible. Under the excitation of acoustic waves at its resonant frequency of 5222 Hz, the oscillating mirror demonstrates a high sensitivity of 15.43 mV/ Pa (bias voltage: 1 V) with a linear response. The first harmonic (1f) photoacoustic signals at a modulation period are linearly detected within a wide CO2 gas concentration range from 500 to 20000 ppm. For a 120 s integration time, the detection limit can reach to 42 ppm according to Allan deviation.
AB - This study reports a MEMS skewed oscillating mirror with built-in piezoresistive angle sensor for photoacoustic spectroscopy gas detection. The MEMS mirror with asymmetric configuration is more conducive to generating a torsional motion when excited by acoustic wave. The torsional angle, i.e., the resonant amplitude, can be linearly detected by a built-in piezo-resistive Wheatstone bridge angle sensor. To enhance the photoacoustic signal, the resonant frequency of the MEMS mirror (designed: 5702 Hz; fabricated: 5222 Hz) matches with that of the photoacoustic chamber (designed: 5249 Hz) as much as possible. Under the excitation of acoustic waves at its resonant frequency of 5222 Hz, the oscillating mirror demonstrates a high sensitivity of 15.43 mV/ Pa (bias voltage: 1 V) with a linear response. The first harmonic (1f) photoacoustic signals at a modulation period are linearly detected within a wide CO2 gas concentration range from 500 to 20000 ppm. For a 120 s integration time, the detection limit can reach to 42 ppm according to Allan deviation.
KW - MEMS skewed mirror
KW - Wheatstone bridge sensor
KW - photoacoustic spectroscopy
KW - resonator
KW - trace gas detection
UR - https://www.scopus.com/pages/publications/105041712574
U2 - 10.1109/MEMS64181.2026.11419368
DO - 10.1109/MEMS64181.2026.11419368
M3 - 会议稿件
AN - SCOPUS:105041712574
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1056
EP - 1059
BT - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Y2 - 25 January 2026 through 29 January 2026
ER -