TY - GEN
T1 - A MEMS Skewed Oscillating Mirror with a Dual-resonance System for Photoacoustic CO2 Gas Detection
AU - Liu, Yun
AU - Shi, Penghong
AU - Yang, Zhenjun
AU - Zhu, Minjie
AU - Li, Bing
AU - Xue, Gaopeng
N1 - Publisher Copyright:
© 2026 IEEE.
PY - 2026
Y1 - 2026
N2 - This research presents a MEMS skewed oscillating mirror with a dual-resonance system for photoacoustic CO2 gas detection. The asymmetrically supported mirror employs a skewed geometry to enhance acoustic torque, with integrated piezoresistive sensors (Wheatstone bridge) at the torsion bar roots for linear deflection detection. A dual-resonance design, matching the mirror's resonant frequency with the photoacoustic cell's acoustic frequency, is adopted to dramatically improve the sensitivity. Fabricated on a 4-inch SOI wafer, the MEMS device achieves 15.43 mV/Pa/V acoustic sensitivity. The photoacoustic system, utilizing second harmonic wavelength modulation, demonstrates an excellent linearity across a wide concentration range of 1000-20000 ppm CO2, with a detection limit of 26.6 ppm (100 s integration, Allan-Werle analysis). This establishes a novel MEMS-based platform for compact, highly sensitive gas sensors.
AB - This research presents a MEMS skewed oscillating mirror with a dual-resonance system for photoacoustic CO2 gas detection. The asymmetrically supported mirror employs a skewed geometry to enhance acoustic torque, with integrated piezoresistive sensors (Wheatstone bridge) at the torsion bar roots for linear deflection detection. A dual-resonance design, matching the mirror's resonant frequency with the photoacoustic cell's acoustic frequency, is adopted to dramatically improve the sensitivity. Fabricated on a 4-inch SOI wafer, the MEMS device achieves 15.43 mV/Pa/V acoustic sensitivity. The photoacoustic system, utilizing second harmonic wavelength modulation, demonstrates an excellent linearity across a wide concentration range of 1000-20000 ppm CO2, with a detection limit of 26.6 ppm (100 s integration, Allan-Werle analysis). This establishes a novel MEMS-based platform for compact, highly sensitive gas sensors.
KW - Acoustic sensor
KW - MEMS mirror
KW - Wheatstone bridge sensor
KW - gas detection
KW - photoacoustic spectroscopy
UR - https://www.scopus.com/pages/publications/105047789773
U2 - 10.1109/NEMS69704.2026.11633671
DO - 10.1109/NEMS69704.2026.11633671
M3 - 会议稿件
AN - SCOPUS:105047789773
T3 - 2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026
SP - 58
EP - 61
BT - 2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026
Y2 - 17 April 2026 through 21 April 2026
ER -