A machining process chain system for precision manufacture of Polar microstructures

Polar microstructures are three dimensional (3D) structured surfaces possessing a pattern of distribution of latitude and longitude microtopographies with geometrical characteristics which is similar to that in earth's north or south pole. The spacing of its texture can achieve micrometer level. Polar microstructures have great potential of applications in many areas such as polar coordinate system, datum for precision measurement, etc. They are usually machined by Fast Tool Servo (FTS) machining after complicated generation of tool path. However, FTS machining method suffers from complicated program coding, low machining efficiency, limited size of the workpiece and dynamic characteristics of FTS. This paper presents a study of machining process chain system which combines turning and broaching machining processes together to precision manufacture of polar microstructures. A framework of machining process chain system is presented which is composed of input module, deign module, metrology module and output module. Based on the design principle of polar microstructures and a series of machining process steps, a series of experiments are conducted to ultra-precision machining various types of polar microstructures. The machining results show that the machining process chain system is technical feasible and effective in precision manufacture of polar microstructures. The technological advantages of the system are also realized.