A low-noise CMOS interface circuit for closed-loop accelerometer

Liang Yin; Xiaowei Liu; Wei Chen; Weiping Chen; Zhiping Zhou

doi:10.1109/NEMS.2009.5068628

A low-noise CMOS interface circuit for closed-loop accelerometer

Liang Yin^*
, Xiaowei Liu
, Wei Chen
, Weiping Chen
, Zhiping Zhou

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology
Ministry of Education of the People's Republic of China

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

In this paper, design and characterization of a 18V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is presented. The pendulous silicon accelerometer operates in atmosphere pressure and is designed for non-peaking (low-Q) response with a sensitivity of 0.5pF/g without vacuum packaging. Test results shows that a full scale acceleration of ±15 g and a signal bandwidth of 300 Hz is achieved. The complete module operates from a single 18V supply and has a measured sensitivity of 420mV/g with a noise of floor of 10 μg/̧Hz in closed-loop. The chip is fabricated in the 2 um two-metal and two-poly n-well CMOS process with an area of 15.2 mm².

Original language	English
Title of host publication	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages	502-505
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2009.5068628
State	Published - 2009
Event	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: 5 Jan 2009 → 8 Jan 2009

Publication series

Name	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Conference

Conference	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country/Territory	China
City	Shenzhen
Period	5/01/09 → 8/01/09

Keywords

Closed-loop accelerometer
Inertial sensors
Interface circuit
Switched capacitor

Access to Document

10.1109/NEMS.2009.5068628

Cite this

Yin, L., Liu, X., Chen, W., Chen, W., & Zhou, Z. (2009). A low-noise CMOS interface circuit for closed-loop accelerometer. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 502-505). Article 5068628 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068628

@inproceedings{2ec001a086b54c68b7889c5d9670fade,

title = "A low-noise CMOS interface circuit for closed-loop accelerometer",

abstract = "In this paper, design and characterization of a 18V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is presented. The pendulous silicon accelerometer operates in atmosphere pressure and is designed for non-peaking (low-Q) response with a sensitivity of 0.5pF/g without vacuum packaging. Test results shows that a full scale acceleration of ±15 g and a signal bandwidth of 300 Hz is achieved. The complete module operates from a single 18V supply and has a measured sensitivity of 420mV/g with a noise of floor of 10 μg{\c /}Hz in closed-loop. The chip is fabricated in the 2 um two-metal and two-poly n-well CMOS process with an area of 15.2 mm2.",

keywords = "Closed-loop accelerometer, Inertial sensors, Interface circuit, Switched capacitor",

author = "Liang Yin and Xiaowei Liu and Wei Chen and Weiping Chen and Zhiping Zhou",

year = "2009",

doi = "10.1109/NEMS.2009.5068628",

language = "英语",

isbn = "9781424446308",

series = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

pages = "502--505",

booktitle = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

note = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 ; Conference date: 05-01-2009 Through 08-01-2009",

}

Yin, L, Liu, X, Chen, W, Chen, W & Zhou, Z 2009, A low-noise CMOS interface circuit for closed-loop accelerometer. in 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068628, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, pp. 502-505, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 5/01/09. https://doi.org/10.1109/NEMS.2009.5068628

A low-noise CMOS interface circuit for closed-loop accelerometer. / Yin, Liang; Liu, Xiaowei; Chen, Wei et al.
4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 502-505 5068628 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A low-noise CMOS interface circuit for closed-loop accelerometer

AU - Yin, Liang

AU - Liu, Xiaowei

AU - Chen, Wei

AU - Chen, Weiping

AU - Zhou, Zhiping

PY - 2009

Y1 - 2009

N2 - In this paper, design and characterization of a 18V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is presented. The pendulous silicon accelerometer operates in atmosphere pressure and is designed for non-peaking (low-Q) response with a sensitivity of 0.5pF/g without vacuum packaging. Test results shows that a full scale acceleration of ±15 g and a signal bandwidth of 300 Hz is achieved. The complete module operates from a single 18V supply and has a measured sensitivity of 420mV/g with a noise of floor of 10 μg/̧Hz in closed-loop. The chip is fabricated in the 2 um two-metal and two-poly n-well CMOS process with an area of 15.2 mm2.

AB - In this paper, design and characterization of a 18V switched-capacitor CMOS interface circuit for the closed-loop operation of a capacitive accelerometer is presented. The pendulous silicon accelerometer operates in atmosphere pressure and is designed for non-peaking (low-Q) response with a sensitivity of 0.5pF/g without vacuum packaging. Test results shows that a full scale acceleration of ±15 g and a signal bandwidth of 300 Hz is achieved. The complete module operates from a single 18V supply and has a measured sensitivity of 420mV/g with a noise of floor of 10 μg/̧Hz in closed-loop. The chip is fabricated in the 2 um two-metal and two-poly n-well CMOS process with an area of 15.2 mm2.

KW - Closed-loop accelerometer

KW - Inertial sensors

KW - Interface circuit

KW - Switched capacitor

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U2 - 10.1109/NEMS.2009.5068628

DO - 10.1109/NEMS.2009.5068628

M3 - 会议稿件

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SN - 9781424446308

T3 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

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EP - 505

BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

T2 - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Y2 - 5 January 2009 through 8 January 2009

ER -

A low-noise CMOS interface circuit for closed-loop accelerometer

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