A high-performance fourth-order sigma-delta micromachined accelerometer

Yaoguang Li; Xiaowei Liu; Yan Xiao; Yuntao Liu

doi:10.4028/www.scientific.net/KEM.483.422

A high-performance fourth-order sigma-delta micromachined accelerometer

Yaoguang Li^*
, Xiaowei Liu
, Yan Xiao
, Yuntao Liu

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology
College of Information and Communication Engineering, Harbin Engineering University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper reports on a system level design and analysis of a single-loop fourth-order sigma-delta (ΣΔ) accelerometer. Compared with a second-order single-loop ΣΔ modulator (ΣΔM) formed by the sensing element here the sensing element is cascaded with two extra electronic integrators to form the fourth ΣΔM, which has the advantages of better signal to quantization noise ratio (SQNR). System level simulation results indicate that the SQNR is 96.86 dB, and the effective number of bits (ENOB) is 15.8 bits when the over sampling ratio (OSR) is 128. Stability of the system is analyzed by root locus method based on the linear model established in this work, and the minimum gain of the quantizer Kq _min is about 0.375.

Original language	English
Title of host publication	MEMS/NEMS Nano Technology
Publisher	Trans Tech Publications Ltd
Pages	422-426
Number of pages	5
ISBN (Print)	9783037851753
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.483.422
State	Published - 2011

Publication series

Name	Key Engineering Materials
Volume	483
ISSN (Print)	1013-9826
ISSN (Electronic)	1662-9795

Keywords

Accelerometer
Micro-machined
Quantization noise
Sigma-delta
System

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10.4028/www.scientific.net/KEM.483.422

Cite this

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title = "A high-performance fourth-order sigma-delta micromachined accelerometer",

abstract = "This paper reports on a system level design and analysis of a single-loop fourth-order sigma-delta (ΣΔ) accelerometer. Compared with a second-order single-loop ΣΔ modulator (ΣΔM) formed by the sensing element here the sensing element is cascaded with two extra electronic integrators to form the fourth ΣΔM, which has the advantages of better signal to quantization noise ratio (SQNR). System level simulation results indicate that the SQNR is 96.86 dB, and the effective number of bits (ENOB) is 15.8 bits when the over sampling ratio (OSR) is 128. Stability of the system is analyzed by root locus method based on the linear model established in this work, and the minimum gain of the quantizer Kq min is about 0.375.",

keywords = "Accelerometer, Micro-machined, Quantization noise, Sigma-delta, System",

author = "Yaoguang Li and Xiaowei Liu and Yan Xiao and Yuntao Liu",

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AU - Li, Yaoguang

AU - Liu, Xiaowei

AU - Xiao, Yan

AU - Liu, Yuntao

PY - 2011

Y1 - 2011

N2 - This paper reports on a system level design and analysis of a single-loop fourth-order sigma-delta (ΣΔ) accelerometer. Compared with a second-order single-loop ΣΔ modulator (ΣΔM) formed by the sensing element here the sensing element is cascaded with two extra electronic integrators to form the fourth ΣΔM, which has the advantages of better signal to quantization noise ratio (SQNR). System level simulation results indicate that the SQNR is 96.86 dB, and the effective number of bits (ENOB) is 15.8 bits when the over sampling ratio (OSR) is 128. Stability of the system is analyzed by root locus method based on the linear model established in this work, and the minimum gain of the quantizer Kq min is about 0.375.

AB - This paper reports on a system level design and analysis of a single-loop fourth-order sigma-delta (ΣΔ) accelerometer. Compared with a second-order single-loop ΣΔ modulator (ΣΔM) formed by the sensing element here the sensing element is cascaded with two extra electronic integrators to form the fourth ΣΔM, which has the advantages of better signal to quantization noise ratio (SQNR). System level simulation results indicate that the SQNR is 96.86 dB, and the effective number of bits (ENOB) is 15.8 bits when the over sampling ratio (OSR) is 128. Stability of the system is analyzed by root locus method based on the linear model established in this work, and the minimum gain of the quantizer Kq min is about 0.375.

KW - Accelerometer

KW - Micro-machined

KW - Quantization noise

KW - Sigma-delta

KW - System

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DO - 10.4028/www.scientific.net/KEM.483.422

M3 - 会议稿件

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T3 - Key Engineering Materials

SP - 422

EP - 426

BT - MEMS/NEMS Nano Technology

PB - Trans Tech Publications Ltd

ER -

A high-performance fourth-order sigma-delta micromachined accelerometer

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