A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure

Zhiyong Wu; Ting Huang; Cheng Hou; Fengxia Wang; Huicong Liu; Zhan Yang; Tao Chen; Lining Sun

doi:10.1109/3M-NANO49087.2021.9599733

A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure

Zhiyong Wu
, Ting Huang
, Cheng Hou
, Fengxia Wang^*
, Huicong Liu
, Zhan Yang
, Tao Chen
, Lining Sun^*

^*Corresponding author for this work

Soochow University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

This paper presents a novel flexible triaxial force sensor based on the capacitive pressure sensor array. The main structures of the sensor consist of the triangular pyramid microstructure electrode and the orthogonal triangular pyramid microstructure with the spacing of 20μm, which makes the sensor have a large pressure detection range and high sensitivity at the same time. The triaxial force sensor based on the sensor array can measure the triaxial force in real time, and the ranges of normal force and tangential force are 0-3 N and 0-0.5 N, respectively. The proposed flexible triaxial force sensor is expected to have a good application prospect in the field of human-computer interaction.

Original language	English
Title of host publication	2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	319-323
Number of pages	5
ISBN (Electronic)	9781665448819
DOIs	https://doi.org/10.1109/3M-NANO49087.2021.9599733
State	Published - 2021
Externally published	Yes
Event	2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Xi'an, China Duration: 2 Aug 2021 → 6 Aug 2021

Publication series

Name	2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings

Conference

Conference	2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021
Country/Territory	China
City	Xi'an
Period	2/08/21 → 6/08/21

Keywords

Capacitive sensor
flexible sensor array
triangular pyramid microstructure
triaxial force measurement

Access to Document

10.1109/3M-NANO49087.2021.9599733

Cite this

Wu, Z., Huang, T., Hou, C., Wang, F., Liu, H., Yang, Z., Chen, T., & Sun, L. (2021). A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure. In 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings (pp. 319-323). (2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/3M-NANO49087.2021.9599733

Wu, Zhiyong ; Huang, Ting ; Hou, Cheng et al. / A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure. 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 319-323 (2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings).

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title = "A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure",

abstract = "This paper presents a novel flexible triaxial force sensor based on the capacitive pressure sensor array. The main structures of the sensor consist of the triangular pyramid microstructure electrode and the orthogonal triangular pyramid microstructure with the spacing of 20μm, which makes the sensor have a large pressure detection range and high sensitivity at the same time. The triaxial force sensor based on the sensor array can measure the triaxial force in real time, and the ranges of normal force and tangential force are 0-3 N and 0-0.5 N, respectively. The proposed flexible triaxial force sensor is expected to have a good application prospect in the field of human-computer interaction.",

keywords = "Capacitive sensor, flexible sensor array, triangular pyramid microstructure, triaxial force measurement",

author = "Zhiyong Wu and Ting Huang and Cheng Hou and Fengxia Wang and Huicong Liu and Zhan Yang and Tao Chen and Lining Sun",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 ; Conference date: 02-08-2021 Through 06-08-2021",

year = "2021",

doi = "10.1109/3M-NANO49087.2021.9599733",

language = "英语",

series = "2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "319--323",

booktitle = "2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings",

address = "美国",

}

Wu, Z, Huang, T, Hou, C, Wang, F, Liu, H, Yang, Z, Chen, T & Sun, L 2021, A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure. in 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings. 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 319-323, 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021, Xi'an, China, 2/08/21. https://doi.org/10.1109/3M-NANO49087.2021.9599733

A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure. / Wu, Zhiyong; Huang, Ting; Hou, Cheng et al.
2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. p. 319-323 (2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure

AU - Wu, Zhiyong

AU - Huang, Ting

AU - Hou, Cheng

AU - Wang, Fengxia

AU - Liu, Huicong

AU - Yang, Zhan

AU - Chen, Tao

AU - Sun, Lining

PY - 2021

Y1 - 2021

N2 - This paper presents a novel flexible triaxial force sensor based on the capacitive pressure sensor array. The main structures of the sensor consist of the triangular pyramid microstructure electrode and the orthogonal triangular pyramid microstructure with the spacing of 20μm, which makes the sensor have a large pressure detection range and high sensitivity at the same time. The triaxial force sensor based on the sensor array can measure the triaxial force in real time, and the ranges of normal force and tangential force are 0-3 N and 0-0.5 N, respectively. The proposed flexible triaxial force sensor is expected to have a good application prospect in the field of human-computer interaction.

AB - This paper presents a novel flexible triaxial force sensor based on the capacitive pressure sensor array. The main structures of the sensor consist of the triangular pyramid microstructure electrode and the orthogonal triangular pyramid microstructure with the spacing of 20μm, which makes the sensor have a large pressure detection range and high sensitivity at the same time. The triaxial force sensor based on the sensor array can measure the triaxial force in real time, and the ranges of normal force and tangential force are 0-3 N and 0-0.5 N, respectively. The proposed flexible triaxial force sensor is expected to have a good application prospect in the field of human-computer interaction.

KW - Capacitive sensor

KW - flexible sensor array

KW - triangular pyramid microstructure

KW - triaxial force measurement

UR - https://www.scopus.com/pages/publications/85123316593

U2 - 10.1109/3M-NANO49087.2021.9599733

DO - 10.1109/3M-NANO49087.2021.9599733

M3 - 会议稿件

AN - SCOPUS:85123316593

T3 - 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings

SP - 319

EP - 323

BT - 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021

Y2 - 2 August 2021 through 6 August 2021

ER -

Wu Z, Huang T, Hou C, Wang F, Liu H, Yang Z et al. A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure. In 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2021. p. 319-323. (2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings). doi: 10.1109/3M-NANO49087.2021.9599733

A flexible triaxial force capacitive sensor with microstructure electrode and orthogonal microstructure

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Keywords

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