TY - GEN
T1 - A flexible microassembly system for automated fabrication of MEMS sensors
AU - Xie, Hui
AU - Rong, Weibin
AU - Sun, Lining
AU - Chen, Liguo
PY - 2006
Y1 - 2006
N2 - Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians. To reduce the production costs and simultaneously obtain high production quality, a flexible microassembly system for automated bonding of MEMS sensors is developed. The system consists of a set of autonomous modules that can adapt their structures and functions to various sizes of MEMS sensors, including positioning stages, a microscopy imaging system, a flexible micromanipulator, a heater, a fixture, a supply station and auxiliary systems. Optomechatronic design is essential to the development of integrated systems due to the basic importance of microscope optics to microassembly. In this paper, Major methodology issues in optomechatronic design of this system are introduced. A wavelet-based microscopic focus measure and a control scheme with a modified Smith predicator to decrease the inherent time delay of vision system are presented. A smart force sensor with one dimension is employed to sense and control the interactive force. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is developed. The productivity of the flexible microassembly system is validated by further experiments.
AB - Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians. To reduce the production costs and simultaneously obtain high production quality, a flexible microassembly system for automated bonding of MEMS sensors is developed. The system consists of a set of autonomous modules that can adapt their structures and functions to various sizes of MEMS sensors, including positioning stages, a microscopy imaging system, a flexible micromanipulator, a heater, a fixture, a supply station and auxiliary systems. Optomechatronic design is essential to the development of integrated systems due to the basic importance of microscope optics to microassembly. In this paper, Major methodology issues in optomechatronic design of this system are introduced. A wavelet-based microscopic focus measure and a control scheme with a modified Smith predicator to decrease the inherent time delay of vision system are presented. A smart force sensor with one dimension is employed to sense and control the interactive force. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is developed. The productivity of the flexible microassembly system is validated by further experiments.
KW - Batch microassembly
KW - Flexible microassembly system
KW - MEMS sensors
KW - Optomechatronics
UR - https://www.scopus.com/pages/publications/34547186472
U2 - 10.1109/ICARCV.2006.345151
DO - 10.1109/ICARCV.2006.345151
M3 - 会议稿件
AN - SCOPUS:34547186472
SN - 1424403421
SN - 9781424403424
T3 - 9th International Conference on Control, Automation, Robotics and Vision, 2006, ICARCV '06
BT - 9th International Conference on Control, Automation, Robotics and Vision, 2006, ICARCV '06
PB - IEEE Computer Society
T2 - 9th International Conference on Control, Automation, Robotics and Vision, ICARCV 2006
Y2 - 5 December 2006 through 8 December 2006
ER -