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A fast tool servo feeding mechanism of a swing feed ultra precision diamond turning machine

  • Harbin Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A fast tool servo feed mechanism is designed to facilitate the machining of precision large aspheric surface components with big asphericity and profile precision with sub-micron accuracy on a swing feed ultra-precision diamond turning machine. The swing feed ultra-precision diamond turning machine incorporates a swing arm that allows the cutting tool to rotate around the axis of hydraulic motor which is not parallel to the axis of spindle which workpiece is installed one to enable the machining of spherical surface, and accurately machining of aspheric surface parts often requires that the cutting tool can move precisely along the spherical surface normal. The fast tool servo realizes the tool position using flexures with high stiffness that is designed using finite element analyses. The flexures are driven by piezo actuators, which provides a position accuracy of 55 nm.

Original languageEnglish
Title of host publicationProceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
EditorsR. Leach
Publishereuspen
Pages341-342
Number of pages2
ISBN (Electronic)9780956679079
StatePublished - 2015
Event15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 - Leuven, Belgium
Duration: 1 Jun 20155 Jun 2015

Publication series

NameProceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015

Conference

Conference15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
Country/TerritoryBelgium
CityLeuven
Period1/06/155/06/15

Keywords

  • Fast tool servo
  • Flexure hinge
  • Swing feed
  • Ultra-precision diamond turning

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