Abstract
To ensure normal operation of precision geometric metrology, a system by means of software LabVIEW is developed for measuring environmental parameters such as temperature, humidity, air pressure and CO2 content. According to the slow-changing characteristics of the environmental signals, the mean- and median- filter are integrated to process raw data detected. The data of humidity, air pressure and CO2 content are almost no change whether the measuring machine running or not, while temperature uniformity changes a lot. When the machine is off, the 9 spots temperature uniformity (the difference among each measurement spots at same time) is less than 0.5°C/8h; when system is working, the maximum of temperature uniformity is 3°C/8h.Experiments show that the system can monitor the data changes of the environmental parameters.
| Original language | English |
|---|---|
| Pages (from-to) | 139-143 |
| Number of pages | 5 |
| Journal | Jiliang Xuebao/Acta Metrologica Sinica |
| Volume | 31 |
| Issue number | 6 A |
| DOIs | |
| State | Published - Dec 2010 |
| Externally published | Yes |
Keywords
- Environmental parameters
- Mean-filter
- Median-filter
- Metrology
- Nano-measurement
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