Skip to main navigation Skip to search Skip to main content

A environmental parameters monitoring system for high-precision geometric measurement

  • Jian Ding*
  • , Si Tian Gao
  • , Hong Bo Li
  • , Jian Jun Cui
  • *Corresponding author for this work
  • National Institute of Metrology China
  • Beijing Institute of Technology

Research output: Contribution to journalArticlepeer-review

Abstract

To ensure normal operation of precision geometric metrology, a system by means of software LabVIEW is developed for measuring environmental parameters such as temperature, humidity, air pressure and CO2 content. According to the slow-changing characteristics of the environmental signals, the mean- and median- filter are integrated to process raw data detected. The data of humidity, air pressure and CO2 content are almost no change whether the measuring machine running or not, while temperature uniformity changes a lot. When the machine is off, the 9 spots temperature uniformity (the difference among each measurement spots at same time) is less than 0.5°C/8h; when system is working, the maximum of temperature uniformity is 3°C/8h.Experiments show that the system can monitor the data changes of the environmental parameters.

Original languageEnglish
Pages (from-to)139-143
Number of pages5
JournalJiliang Xuebao/Acta Metrologica Sinica
Volume31
Issue number6 A
DOIs
StatePublished - Dec 2010
Externally publishedYes

Keywords

  • Environmental parameters
  • Mean-filter
  • Median-filter
  • Metrology
  • Nano-measurement

Fingerprint

Dive into the research topics of 'A environmental parameters monitoring system for high-precision geometric measurement'. Together they form a unique fingerprint.

Cite this