@inproceedings{b2820ddd198045e290927d23622e9a76,
title = "A displacement measuring system based on grating double Diffraction",
abstract = "A displacement measuring system based on grating double diffraction is proposed in this paper to eliminate the impact of multiple reflections of the zero-order diffraction beam and to reduce the stray light coming from the interference field. The principle of the proposed system is that with the proper interference of the first order beam of second diffraction, a displacement transducer can be obtained via the Doppler frequency shift and phase decoding. Simulation tests are conducted using Light Tools model to prove the effectiveness of the proposed system. And experiment results shows that a resolution of 20 nm can be achieved over a range of 25 mm. It is therefore concluded that the proposed system can be used to improve the measurement resolution and accuracy.",
keywords = "Displacement measuring, Grating double diffraction, Interference, Second diffraction",
author = "Bo Zhao and Lei Wang and Xu, \{Min Er\} and Hong Zhao and Liu, \{Xiang Dong\}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; 9th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2014 ; Conference date: 08-08-2014 Through 10-08-2014",
year = "2015",
doi = "10.1117/12.2182024",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Xianfang Wen and Jiubin Tan",
booktitle = "Ninth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "美国",
}