@inproceedings{bfee8f6478b14a71b2aa364ac82c931c,
title = "A differential giant magnetostrictive mitro-displacement actuator",
abstract = "Actuators made of Giant Magnetostrictive Material (GMM) are used more and more widely in ultra-precision positioning, processing, measurement, and vibration isolation of equipment. While a single Giant Magnetostrictive Actuator (GMA) has low load capacity and non-ideal dynamic output characteristics, this paper presents a differential Giant Magnetostrictive Mitro-Displacement Actuator. The effect of the equivalent stiffness and quality of the load on the output characteristics of the actuator is analyzed by establishing the dynamic model of differential GMA. The experimental results show that compared to a single GMA micro-displacement actuator system, the differential GMA system has a positioning noise of ±3 nm, a resolution of 6 nm within a 18.5μm travel range. In the composite control system, a hysteresis-free sinusoidal displacement output with an amplitude of 3μm within 200 Hz is realized, and the maximum output error is 0.6μm, which effectively improves the dynamic performance of the actuator and improves the load capacity of the actuator.",
keywords = "GMM, differential GMA, equivalent stiffness, positioning noise, resolution",
author = "Jing Wang and Lei Wang and Yixin Li and Junzhong Li and Xaioyu Zhu",
note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; 10th International Symposium on Precision Engineering Measurements and Instrumentation, ISPEMI 2018 ; Conference date: 08-08-2018 Through 10-08-2018",
year = "2019",
doi = "10.1117/12.2512315",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Jie Lin and Jiubin Tan",
booktitle = "Tenth International Symposium on Precision Engineering Measurements and Instrumentation",
address = "美国",
}