A comparative Raman study of thermal stability of amorphous diamond films deposited with different substrate bias

Zhu Jiaqi; Han Jiecai; Han Xiao; Meng Songhe; Jia Zechun; Yang Jin; Cheng Kun

doi:10.1016/j.scriptamat.2006.08.031

A comparative Raman study of thermal stability of amorphous diamond films deposited with different substrate bias

Zhu Jiaqi^*
, Han Jiecai
, Han Xiao
, Meng Songhe
, Jia Zechun
, Yang Jin
, Cheng Kun

^*Corresponding author for this work

School of Astronautics

Harbin Institute of Technology

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

This paper describes thermal stability of amorphous diamond films deposited using a filtered arc as a function of the substrate bias using a comparative Raman investigation. The thermal stability decreases with increasing substrate bias. The films with the richest sp³ content might not have the best thermal stability. Annealing results in an upward shift and a narrowing of the G-peak. Visible Raman can provide a powerful way to follow the evolution and ordering of sp² sites in the films.

Original language	English
Pages (from-to)	1167-1170
Number of pages	4
Journal	Scripta Materialia
Volume	55
Issue number	12
DOIs	https://doi.org/10.1016/j.scriptamat.2006.08.031
State	Published - Dec 2006

Keywords

Amorphous materials
Annealing
Raman spectroscopy
Thermal stability
Thin films

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10.1016/j.scriptamat.2006.08.031

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title = "A comparative Raman study of thermal stability of amorphous diamond films deposited with different substrate bias",

abstract = "This paper describes thermal stability of amorphous diamond films deposited using a filtered arc as a function of the substrate bias using a comparative Raman investigation. The thermal stability decreases with increasing substrate bias. The films with the richest sp3 content might not have the best thermal stability. Annealing results in an upward shift and a narrowing of the G-peak. Visible Raman can provide a powerful way to follow the evolution and ordering of sp2 sites in the films.",

keywords = "Amorphous materials, Annealing, Raman spectroscopy, Thermal stability, Thin films",

author = "Zhu Jiaqi and Han Jiecai and Han Xiao and Meng Songhe and Jia Zechun and Yang Jin and Cheng Kun",

year = "2006",

month = dec,

doi = "10.1016/j.scriptamat.2006.08.031",

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volume = "55",

pages = "1167--1170",

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T1 - A comparative Raman study of thermal stability of amorphous diamond films deposited with different substrate bias

AU - Jiaqi, Zhu

AU - Jiecai, Han

AU - Xiao, Han

AU - Songhe, Meng

AU - Zechun, Jia

AU - Jin, Yang

AU - Kun, Cheng

PY - 2006/12

Y1 - 2006/12

N2 - This paper describes thermal stability of amorphous diamond films deposited using a filtered arc as a function of the substrate bias using a comparative Raman investigation. The thermal stability decreases with increasing substrate bias. The films with the richest sp3 content might not have the best thermal stability. Annealing results in an upward shift and a narrowing of the G-peak. Visible Raman can provide a powerful way to follow the evolution and ordering of sp2 sites in the films.

AB - This paper describes thermal stability of amorphous diamond films deposited using a filtered arc as a function of the substrate bias using a comparative Raman investigation. The thermal stability decreases with increasing substrate bias. The films with the richest sp3 content might not have the best thermal stability. Annealing results in an upward shift and a narrowing of the G-peak. Visible Raman can provide a powerful way to follow the evolution and ordering of sp2 sites in the films.

KW - Amorphous materials

KW - Annealing

KW - Raman spectroscopy

KW - Thermal stability

KW - Thin films

UR - https://www.scopus.com/pages/publications/33749529783

U2 - 10.1016/j.scriptamat.2006.08.031

DO - 10.1016/j.scriptamat.2006.08.031

M3 - 文章

AN - SCOPUS:33749529783

SN - 1359-6462

VL - 55

SP - 1167

EP - 1170

JO - Scripta Materialia

JF - Scripta Materialia

IS - 12

ER -

A comparative Raman study of thermal stability of amorphous diamond films deposited with different substrate bias

Abstract

Keywords

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