3-DOF angle measurement method based on two interference images

Xingyang Feng; Xionglei Lin; Liang Yu

doi:10.1117/12.3021974

3-DOF angle measurement method based on two interference images

Xingyang Feng^*
, Xionglei Lin
, Liang Yu

^*Corresponding author for this work

Institute of Ultraprecision Optical and Electronic Instrument Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

With the development of observation satellite, precision lathe and lithography, the demand for high-precision three-degree of freedom(3-DOF) angle measurement instruments is becoming increasingly urgent. Laser measurement has the advantages of high accuracy, non-contact, and large measurement range and is widely used in this area. We established a 3-DOF angle measurement method using two lasers and set a new algorithm to decouple its mathematical model. We analyzed the factors that may affect the resolution of this method, and achieved the simultaneous measurement of pitch, yaw, and roll angles in theory. Our method has high resolution theoretically and does not have the problem of inconsistent coordinate references.

Original language	English
Title of host publication	International Academic Conference on Optics and Photonics, IACOP 2023
Editors	Yang Yue, Gefeson Mendes Pacheco
Publisher	SPIE
ISBN (Electronic)	9781510672543
DOIs	https://doi.org/10.1117/12.3021974
State	Published - 2023
Externally published	Yes
Event	2023 International Academic Conference on Optics and Photonics, IACOP 2023 - Virtual, Online, China Duration: 29 Oct 2023 → 30 Oct 2023

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	12972
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	2023 International Academic Conference on Optics and Photonics, IACOP 2023
Country/Territory	China
City	Virtual, Online
Period	29/10/23 → 30/10/23

Keywords

3-DOF angle measurement
camera interferometer
single beam interference

Access to Document

10.1117/12.3021974

Cite this

@inproceedings{e62c6a63c2ad4c85bc9b23c27b59e5f2,

title = "3-DOF angle measurement method based on two interference images",

abstract = "With the development of observation satellite, precision lathe and lithography, the demand for high-precision three-degree of freedom(3-DOF) angle measurement instruments is becoming increasingly urgent. Laser measurement has the advantages of high accuracy, non-contact, and large measurement range and is widely used in this area. We established a 3-DOF angle measurement method using two lasers and set a new algorithm to decouple its mathematical model. We analyzed the factors that may affect the resolution of this method, and achieved the simultaneous measurement of pitch, yaw, and roll angles in theory. Our method has high resolution theoretically and does not have the problem of inconsistent coordinate references.",

keywords = "3-DOF angle measurement, camera interferometer, single beam interference",

author = "Xingyang Feng and Xionglei Lin and Liang Yu",

note = "Publisher Copyright: {\textcopyright} 2023 SPIE.; 2023 International Academic Conference on Optics and Photonics, IACOP 2023 ; Conference date: 29-10-2023 Through 30-10-2023",

year = "2023",

doi = "10.1117/12.3021974",

language = "英语",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Yang Yue and Pacheco, \{Gefeson Mendes\}",

booktitle = "International Academic Conference on Optics and Photonics, IACOP 2023",

address = "美国",

}

Feng, X, Lin, X & Yu, L 2023, 3-DOF angle measurement method based on two interference images. in Y Yue & GM Pacheco (eds), International Academic Conference on Optics and Photonics, IACOP 2023., 1297204, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12972, SPIE, 2023 International Academic Conference on Optics and Photonics, IACOP 2023, Virtual, Online, China, 29/10/23. https://doi.org/10.1117/12.3021974

3-DOF angle measurement method based on two interference images. / Feng, Xingyang; Lin, Xionglei; Yu, Liang.
International Academic Conference on Optics and Photonics, IACOP 2023. ed. / Yang Yue; Gefeson Mendes Pacheco. SPIE, 2023. 1297204 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12972).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - 3-DOF angle measurement method based on two interference images

AU - Feng, Xingyang

AU - Lin, Xionglei

AU - Yu, Liang

PY - 2023

Y1 - 2023

N2 - With the development of observation satellite, precision lathe and lithography, the demand for high-precision three-degree of freedom(3-DOF) angle measurement instruments is becoming increasingly urgent. Laser measurement has the advantages of high accuracy, non-contact, and large measurement range and is widely used in this area. We established a 3-DOF angle measurement method using two lasers and set a new algorithm to decouple its mathematical model. We analyzed the factors that may affect the resolution of this method, and achieved the simultaneous measurement of pitch, yaw, and roll angles in theory. Our method has high resolution theoretically and does not have the problem of inconsistent coordinate references.

AB - With the development of observation satellite, precision lathe and lithography, the demand for high-precision three-degree of freedom(3-DOF) angle measurement instruments is becoming increasingly urgent. Laser measurement has the advantages of high accuracy, non-contact, and large measurement range and is widely used in this area. We established a 3-DOF angle measurement method using two lasers and set a new algorithm to decouple its mathematical model. We analyzed the factors that may affect the resolution of this method, and achieved the simultaneous measurement of pitch, yaw, and roll angles in theory. Our method has high resolution theoretically and does not have the problem of inconsistent coordinate references.

KW - 3-DOF angle measurement

KW - camera interferometer

KW - single beam interference

UR - https://www.scopus.com/pages/publications/85184805681

U2 - 10.1117/12.3021974

DO - 10.1117/12.3021974

M3 - 会议稿件

AN - SCOPUS:85184805681

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - International Academic Conference on Optics and Photonics, IACOP 2023

A2 - Yue, Yang

A2 - Pacheco, Gefeson Mendes

PB - SPIE

T2 - 2023 International Academic Conference on Optics and Photonics, IACOP 2023

Y2 - 29 October 2023 through 30 October 2023

ER -

3-DOF angle measurement method based on two interference images

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Keywords

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