@inproceedings{39809f8ec5bc41e69b7d9363b1341984,
title = "1-to-32 H-tree optical distribution on adhesively bonded silicon nanomembrane",
abstract = "We developed an adhesive bonding process to integrate silicon nanomembranes onto silicon chips. A grating-coupled 1-to-32 H-tree optical distribution is experimentally demonstrated with an excess loss of 2.2 dB and a uniformity of 0.72 dB.",
author = "Yang Zhang and Xiaochuan Xu and David Kwong and John Covey and Amir Hosseini and Chen, \{Ray T.\}",
year = "2014",
doi = "10.1364/cleo\_si.2014.sm3m.6",
language = "英语",
isbn = "9781557529992",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO\_SI 2014 ; Conference date: 08-06-2014 Through 13-06-2014",
}