高精度小型陀螺仪关键器件加工技术研究进展

The superfluid gyroscope, atomic gyroscope and micro-hemispherical gyroscope have the possibility of high precision and miniaturization which make them the promising gyroscopes. The preparation quality of the key component of these three gyroscopes will directly affect their working performance, so it is necessary to perform in-depth research on the status of the key component preparation processes. Firstly, the structural characteristics, quality and technical indicators and their effect, and preparation technical requirements of these key components are briefly described. On this basis, the research progress on the fabrication technology of high-precision micro gyroscope key components is described, and the manufacturing processes such as the commonly used MEMS processing technology and micro-nano processing technology are reviewed in detail. By comparatively analyzing the preparation process of each key component, the advantages and limitations of each related process are emphasized. For micro-resonators, the process characteristics of mold processing technology in each preparation process and their influence on the quality of the micro-resonator are analyzed. Through analyzing the research progress of the preparation methods of each key component, the existing problems and challenges are discussed to provide a reference for the subsequent combination of micro-nano manufacturing technology and gyroscope technology, and further to promote the practical engineering application of related preparation technologies.