面向二维轨迹跟踪的精密运动台定量反馈交叉耦合控制方法

The demand for part accuracy in high-end manufacturing is increasing steadily, thereby driving the demand for high-precision contour control. The dual-axis precision motion stage is widely used in CNC equipment due to its advantages of high structural rigidity and wide control frequency. In this paper, we first present a composite control method combining feed-forward and feedback for a decoupled single-axis system based on the dynamics model of the dual-axis motion stage. Secondly, the contour error model of tangent approximation is employed to solve the block diagram of the cross-couped control strategy, thereby obtaining the contour error transfer function with or without cross-coupling controller and establishing the equivalent feedback loop. Once more, cross-coupled controllers are designed for time-varying equivalent controlled objects using PID debugging and quantitative feedback methods, respectively. It is demonstrated that the quantitative feedback cross-coupled controllers satisfy the design conditions. Ultimately, by inputting different reference trajectories, simulation verifies the superiority of quantitative feedback cross-coupled control compared with PID-type cross-coupled control in terms of trajectory tracking performance and adaptation to different trajectories.