金刚石颗粒表面磁控溅射镀膜及热处理工艺

The surface coating and heat treatment of diamond particles can solve the problem of high performance interface wetting and combination of high thermal conductivity diamond/copper composites. In this paper, the effects of magnetron sputtering surface coating modified metals Mo and W, and different heat treatment processes on the mass, surface morphology, microstructure and phase composition of coated diamond particles were studied. The results show that Mo coating presents wheat grain structure after magnetron sputtering, while W coating has spherical grain structure; In vacuum environment, with the increase of heat treatment temperature, the sublimation rate of Mo or W will be accelerated, and graphitization will occur on the surface of diamond particles exposed in the environment of heat treatment. After heat treatment of coated diamond particles in Ar environment. At 900 ℃, small amount of Mo or W remains on the plated surface of diamond particles, respectively. Graphitization of diamond particle occurs when the temperature rises to 950 ℃. However, dense MoC_x and WC_x phases form when the heat treatment temperature is 1000 ℃. The graphitization phenomenon is eliminated and a good heat treatment interface is obtained.