载流子浓度与迁移率对氧化物薄膜红外透明导电性能影响的研究进展

Due to the high visible transmittance and conductivity, transparent conductive films caused more and more attention. However, according to the Drude's theory, there still exist some doubts about the possibility of infrared transparent conductive film. It is the fact that, due to the electrical and optical properties determined by carrier concentration, the contradiction between the wide-range infrared transmission and high conductivity is difficult to coordinate. In this paper, firstly, according to interaction between electrons and photons, we explored the key of confliction between electrical and optical properties, and also discovered the feasibility of infrared transparent conductive films. Through theoretical analysis, we found the reasons of contradiction of electrical and optical properties. Secondly, by summarizing and analyzing the photoelectrical properties of the conventional transparent conductive oxide films, we put forward the relationship among free-electrical, mobility, plasma wavelength and conductivity properties. Lastly, as the result of our research, if the film has the wide-range infrared transmission and high conductivity properties at same time, the effect of carrier concentration and mobility on plasma wavelength is not overlooked.